Designing of a MOEMS Gyroscope Based on an Asymmetric-Grating Hybrid-Plasmonic ROC

The article introduces a novel MOEMS gyroscope design based on an asymmetric-grating hybrid-plasmonic readout circuit, aiming to address the limitations of existing devices. The gyroscope leverages the Coriolis effect to convert angular velocity into linear displacement, which is then detected by the readout circuit. The use of surface plasmon polaritons (SPPs) in the readout circuit enhances sensitivity and allows for sub-wavelength confinement, making the device suitable for low-size applications. Simulations using COMSOL and LUMERICAL software demonstrate the mechanical and optical performance of the gyroscope, highlighting its improved sensitivity, reduced size, and enhanced measurement range compared to previous works. The design incorporates a suspended proof mass, comb-drive actuators, and an asymmetric Au grating, with the laser beam impacting at a specific angle to detect displacement. The article concludes by comparing the proposed gyroscope with previous designs, showcasing its superior performance and potential for integration into various applications.