Top

Published in:

13-02-2017 | Technical Paper

Development of a 2D array of micromachined electromagnetic digital actuators for micro-conveyance applications

Authors: Zhichao Shi, Benoît Bélier, Emile Martincic, Laurent Petit, Johan Moulin, Elie Lefeuvre, Jérémy Terrien, Christine Prelle, Frédéric Lamarque

Published in: Microsystem Technologies | Issue 1/2018

Activate our intelligent search to find suitable subject content or patents.

search-config

AI-assisted search

Off

Abstract

In this paper a 5 × 5 micromachined digital electromagnetic actuator array for microdisplacements is presented. Each elementary actuator is composed of a permanent magnet placed in a silicon square cavity. This magnet can be switched between four discrete positions and can be switched by applying current pulses through wires placed below the cavity. A semi-analytical model has been developed to design the actuator. Then, a prototype, composed of a silicon part, has been manufactured using deep reactive ion etching process. An elementary actuator was as firstly experimentally characterized. Then the array was used to realize a conveyance task. The maximum displacement quantum of the conveyed object is 115 µm.

previous article Thermo-mechanical analysis of laser peeling of ultrathin glass for removing edge flaws in web processing applications

next article Compact modeling approach for microchannel cooling and its validation

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

über 102.000 Bücher
über 537 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Finance + Banking
Management + Führung
Marketing + Vertrieb
Maschinenbau + Werkstoffe
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 390 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Maschinenbau + Werkstoffe

Jetzt Wissensvorsprung sichern!

inform now

Bergander A, Driesen W, Varidel T, Breguet JM (2003) Monolithic piezoelectric push-pull actuators for inertial drives. In: IEEE international symposium micromechatronics and human science, pp 309–316

Chouinard P, Plante J (2012) Bistable antagonistic dielectric elastomer actuators for binary robotics and mechatronics. IEEE ASME Trans Mechatron 17(5):857–865CrossRef

Delettre A, Laurent GJ, Haddab Y, Le Fort-Piat N (2012) Robust control of a planar manipulator for flexible and contactless handling. Int J Mechatron 22(6):852–861CrossRef

Fatikow S, Rembold U (1997) Microsystem and microrobot. Springer, BerlinCrossRefMATH

Hofmann A, Hummel B, Firat O, Bretthauer G, Bär M, Meyer M (2011) MicroFLEX—a new concept to address the needs for adaptable meso and micro assembly lines. In: IEEE international symposium on assembly and manufacturing (ISAM), pp 1–5

Ishii H, Ting K-L (2004) SMA actuated compliant bistable mechanisms. Mechatronics 14:421–437CrossRef

Khan MU, Bencheikh N, Prelle C, Lamarque F, Beutel T, Büttgenbach S (2012) A long stroke electromagnetic XY positioning stage for micro applications. IEEE ASME Trans Mechatron 17(5):866–875CrossRef

Kobel P, Clavel R (2011) Micro robot for rotary desktop assembly line. In: IEEE international symposium on assembly and manufacturing (ISAM), pp 1–6

Nguyen VH, Kim WJ (2012) Novel electromagnetic design for a precision planar positioning moving over a superimposed concentrated-field magnet matrix. IEEE Trans Energy Convers 27(1):52–62MathSciNetCrossRef

Petit L, Prelle C, Doré E, Lamarque F, Bigerelle M (2010) Four discrete positions electromagnetic actuator: modelling and experimentation. IEEE ASME Trans Mechatron 15(1):88–96CrossRef

Petit L, Hassine A, Terrien J, Lamarque F, Prelle C (2014) Development of a control module for a digital electromagnetic actuators array. IEEE Trans Ind Electron 61(9):4788–4796CrossRef

Prelle C, Lamarque F, Revel P (2006) Reflective optical sensor for long range and high-resolution displacements. Sens Actuators A 127:139–146CrossRef

Siltala N, Prusi T, Vuola A, Heikkilä R, Tuokko R (2011) Modular microfactory system for gas sensor assembly. In: IEEE international symposium on assembly and manufacturing (ISAM), pp 1–6

Title: Development of a 2D array of micromachined electromagnetic digital actuators for micro-conveyance applications
Authors: Zhichao Shi
Benoît Bélier
Emile Martincic
Laurent Petit
Johan Moulin
Elie Lefeuvre
Jérémy Terrien
Christine Prelle
Frédéric Lamarque
Publication date: 13-02-2017
Publisher: Springer Berlin Heidelberg
Published in: Microsystem Technologies / Issue 1/2018
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-017-3320-1

Springer Professional

Abstract

Please log in to get access to your license.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Springer Professional "Technik"

Other articles of this Issue 1/2018

Enhancement of vertical integration density by engineered BSOI wafers

Performance of I-shaped piezoelectric-excited millimeter-sized cantilever in sensing applications: modeling, simulation and experiment

Maximum torque per ampere control of IPMSM drive by fuzzy logic

Investigation of polycyanurate/benzoxazine curing system

Inter node parallelization of multiscale fluid particle simulation towards large-scale polymeric fluid simulation

Fabrication of silica-coated hollow particles by using ultrasonically generated microbubbles