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Dynamic rate-dependent hysteresis modeling and trajectory prediction of voice coil motors based on TF-NARX neural network

  • 12-07-2023
  • Technical Paper
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Abstract

The article introduces a novel TF-NARX neural network model for dynamic rate-dependent hysteresis modeling and trajectory prediction of voice coil motors (VCMs). VCMs, crucial in high-precision positioning, suffer from severe rate-dependent hysteresis, which reduces positioning accuracy. Traditional models struggle to accurately describe this nonlinearity. The proposed TF-NARX model combines a transfer function with a NARX neural network to dynamically model hysteresis, showing superior accuracy and stability across a frequency range of 15-55Hz. The model's inverse is designed using a direct inverse method, demonstrating effective trajectory tracking in simulations. This innovative approach promises to significantly enhance the positioning accuracy and performance of VCMs, paving the way for large range, high precision, and speed adaptive micro/nano scanning.

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Title
Dynamic rate-dependent hysteresis modeling and trajectory prediction of voice coil motors based on TF-NARX neural network
Authors
Rui Lin
Yingzi Li
Zeyu Xu
Peng Cheng
Xiaodong Gao
Wendong Sun
Yifan Hu
Quan Yuan
Jianqiang Qian
Publication date
12-07-2023
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 9/2023
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-023-05504-y
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in-adhesives, MKVS, Ecoclean/© Ecoclean, Hellmich GmbH/© Hellmich GmbH, Krahn Ceramics/© Krahn Ceramics, Kisling AG/© Kisling AG, ECHTERHAGE HOLDING GMBH&CO.KG - VSE, Schenker Hydraulik AG/© Schenker Hydraulik AG