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Published in: Microsystem Technologies 8/2019

03-12-2018 | Technical Paper

Experimental investigation on size-dependent higher-mode vibration of cantilever microbeams

Authors: Zhenkun Li, Yuming He, Jian Lei, Shihao Han, Song Guo, Dabiao Liu

Published in: Microsystem Technologies | Issue 8/2019

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Abstract

A new perspective is presented to study size-dependent elasticity experimentally within micron scale utilizing dynamic approach. The size-dependent vibration of cantilever microbeams made of nickel is studied for the first three transverse modes. The normalized natural frequency of the first mode manifests strong size effect as reported. Remarkably, the normalized natural frequencies of the second and third mode also increase to 1.9 times as the thickness of microbeams decreases from 15 to 2.1 μm. Similarly the normalized bending rigidity increases to about 3.5 times. It is the first time that elastic size effect is observed in vibration of higher modes. Moreover, the size-dependent vibration of the first mode is interpreted in light of the modified couple stress theory, and the theoretical prediction also fit the experimental results of high modes very well. Hence it is confirmed that modified couple stress theory is valid for vibration of higher modes too.

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Metadata
Title
Experimental investigation on size-dependent higher-mode vibration of cantilever microbeams
Authors
Zhenkun Li
Yuming He
Jian Lei
Shihao Han
Song Guo
Dabiao Liu
Publication date
03-12-2018
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 8/2019
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-018-4244-0

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