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From the Anthycytera Astronomical Clock to Single Molecule Scale Machinery Read chapter Read first chapter

2020 | OriginalPaper | Chapter

Fabricating Solid State Gears at the Nanoscale: A Top–Down Approach

Authors : D. Mailly, G. Faini

Published in: Building and Probing Small for Mechanics

Publisher: Springer International Publishing

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Abstract

A rapid overview on the main lithographic tools used in the top–down approach in nanotechnology including their intrinsic and extrinsic resolution is given in this chapter. Moreover, we discuss the advantages of the use of focused ion beam for very specific applications, complementary to the more standard ones. Finally, we will describe, using focused He ions, how to fabricate solid state gears at the nanoscale, in the range 200 nm down to 50 nm.

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previous chapter Photo-Microlithography Fabrication of the Parts of a Micro-Mechanical Calculator
next chapter Prototypes of Molecular Gears with an Organometallic Piano-Stool Architecture
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Metadata
Title
Fabricating Solid State Gears at the Nanoscale: A Top–Down Approach
Authors
D. Mailly
G. Faini
Copyright Year
2020
Book
Building and Probing Small for Mechanics

Print ISBN: 978-3-030-56776-7

Electronic ISBN: 978-3-030-56777-4

Copyright Year: 2020

DOI
https://doi.org/10.1007/978-3-030-56777-4_4

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