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Nanotechnology and Dimensions Read chapter Read first chapter

2020 | OriginalPaper | Chapter

11. Fabrication of Nanostructures

Authors : T. Daniel Thangadurai, N. Manjubaashini, Sabu Thomas, Hanna J. Maria

Published in: Nanostructured Materials

Publisher: Springer International Publishing

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Abstract

This chapter explains the techniques that are available for fabricating nanostructures and also explain the substrates and wafers, modification of materials, lithography, film deposition, wet and dry etching, wafer bonding and packaging.

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previous chapter Characterization and Technical Analysis of Nanostructured Materials
next chapter Nanostructured Materials for Optical and Electronic Applications
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Metadata
Title
Fabrication of Nanostructures
Authors
T. Daniel Thangadurai
N. Manjubaashini
Sabu Thomas
Hanna J. Maria
Copyright Year
2020
Book
Nanostructured Materials

Print ISBN: 978-3-030-26144-3

Electronic ISBN: 978-3-030-26145-0

Copyright Year: 2020

DOI
https://doi.org/10.1007/978-3-030-26145-0_11

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