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Published in: The International Journal of Advanced Manufacturing Technology 9-10/2021

03-06-2021 | ORIGINAL ARTICLE

Fixed abrasive polishing: the effect of particle size on the workpiece roughness and sub-surface damage

Authors: Xinyu Luo, Wei Yang, Yuan Qian

Published in: The International Journal of Advanced Manufacturing Technology | Issue 9-10/2021

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Abstract

Due to the random and unpredictable shortcomings of traditional polishing, we have carried out research on the fixed abrasive polishing in anhydrous environment. In the fixed abrasive polishing, the particle size is one of the main reasons that affect the quality of the processing. The purpose of this paper is to grasp the deterministic polishing technology, and experiments were conducted to explore the effect of particle size on the workpiece roughness and sub-surface damage (SSD). The results show that there is a nonlinear relationship between roughness and particle size, which may be the result of mechanical and chemical effects in the polishing process. Also, due to the mechanical removal, the SSD still exists and origins with the larger particles in the tail of particle size distribution. Through the experiment and research, we can get the best processing conditions that ceria wheel with a particle size of 100 nm can polish the fused silica with a roughness of 1.98 nm, and the SSD depth is only 80 nm.

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Literature
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go back to reference Liu WJ, Yang W, Guo YB (2019) Characteristic of bound-abrasive polishing for fused silica glass in anhydrous environment [C]. In: 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, vol 10838. International Society for Optics and Photonics, p 1083808. https://doi.org/10.1117/12.2504799 Liu WJ, Yang W, Guo YB (2019) Characteristic of bound-abrasive polishing for fused silica glass in anhydrous environment [C]. In: 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, vol 10838. International Society for Optics and Photonics, p 1083808. https://​doi.​org/​10.​1117/​12.​2504799
Metadata
Title
Fixed abrasive polishing: the effect of particle size on the workpiece roughness and sub-surface damage
Authors
Xinyu Luo
Wei Yang
Yuan Qian
Publication date
03-06-2021
Publisher
Springer London
Published in
The International Journal of Advanced Manufacturing Technology / Issue 9-10/2021
Print ISSN: 0268-3768
Electronic ISSN: 1433-3015
DOI
https://doi.org/10.1007/s00170-021-07363-1

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