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Published in: Journal of Materials Science: Materials in Electronics 3/2014

01-03-2014

Growth of Bi1.5MgNb1.5O7 thin films on Pt/Ti/SiO2/Si substrates by RF magnetron sputtering

Authors: Hong Gao, Yinong Lu, Yunfei Liu, Chengjian Ma, Hao Qian, Jianxiang Ding

Published in: Journal of Materials Science: Materials in Electronics | Issue 3/2014

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Abstract

In this letter, bismuth magnesium niobate (Bi1.5MgNb1.5O7, BMN) thin films were deposited on Pt/Ti/SiO2/Si substrates by using radio-frequency magnetron sputtering at various substrate temperatures. Based on the phase compositions and microstructures of these samples, we discussed the nucleation and growth of the BMN thin films and how the substrate temperature influenced these processes. The thin film begins to crystallize at 450 °C, and the annealed films were all composed of the cubic pyrochlore phase with a strong (222)-preferred orientation. The film deposited at 450 °C exhibited a large dielectric constant of 173, and a tunability of 26.6 % was obtained at a max dc bias field of 0.8 MV/cm.

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Metadata
Title
Growth of Bi1.5MgNb1.5O7 thin films on Pt/Ti/SiO2/Si substrates by RF magnetron sputtering
Authors
Hong Gao
Yinong Lu
Yunfei Liu
Chengjian Ma
Hao Qian
Jianxiang Ding
Publication date
01-03-2014
Publisher
Springer US
Published in
Journal of Materials Science: Materials in Electronics / Issue 3/2014
Print ISSN: 0957-4522
Electronic ISSN: 1573-482X
DOI
https://doi.org/10.1007/s10854-014-1754-0

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