Hybrid Micro-Machining Processes

Micromachining processes have been cynosure for the manufacturing industries owing to its potential to manufacture micro-components such as microsensors, micro-displays, micro-batteries, etc. The different micromachining techniques have established themselves in different areas of daily life such as automotive, photonics, medical instruments, renewable energy, and aerospace. The micro-components are made from multiple materials and are of complex shapes that demand accuracy at submicron levels. To meet the accuracy expectations, a number of micromachining processes and their integration are required. The present chapter conceptualizes the hybrid micromachining processes providing a brief introduction, classification, and few recent applications of the processes. The importance of hybrid machining techniques is reflected in the future scope provided towards the end of the chapter. The chapter finally ends with the concluding remarks.

One of the emerging technologies in the world of micromachining is that of the usage of short and ultrashort laser pulses. Many manufacturing industries have been revolutionized by the employability of laser beam micromachining (LBMM) process for a number of micro-engineering applications. Short and ultrashort laser pulses houses tremendous amount of thermal energy that can be used for the fabrication of micro-features using a wide range of engineering materials. To further extend the capability of the process, the laser is integrated with other standalone micromachining processes such as micro-milling, micro-grinding, electrochemical micromachining, water jet micromachining, etc., and giving rise to hybrid micromachining setup in the form of laser-assisted micromachining process. This chapter begins with a short introduction on laser beam machining. Laser beam micromachining has been discussed next in the subsequent section. The next section elucidates on few applications of the laser-assisted micromachining process. The chapter finally terminates with the concluding remarks.

Micro-EDM process has evidenced itself as a suitable micromachining process for micro-features that are difficult to be produced using conventional processes. However, special machining requirements are needed to be fulfilled for successful miniaturization of EDM process. High precision systems, generators producing small input energy pulses, flushing systems, etc., are the few special requirements. Effective debris removal has been the topic of concern for achieving high precision levels in micro-EDM and scientific community has therefore proposed several assisted micro-EDM processes. The present chapter briefs on magnetic-assisted micro-EDM process. The chapter begins with the introduction to EDM process and then elucidates on the principle of EDM and micro-EDM process. Characteristics of micro-EDM process are discussed next with subsequent discussion on working principle of magnetic-assisted micro-EDM process. The chapter finally terminates with the concluding remarks.

One of the effective nonconventional machining processes is ultrasonic machining (USM) that can machine brittle as well as hard material. An ultrasonic-induced vibrating tool pressurizes the abrasive grains towards the target material and therefore removes the material. Machining precision is one of the major factors that is very critical in achieving parts with high-dimensional tolerances. Production of micro-holes is one of the major applications of micro-USM process. However, chippings produced at the edge of the hole adversely impacts the machining precision. Chippings can be taken care off by employing electrorheological fluid in tandem with the micro-USM process and therefore giving birth to a hybrid micromachining process, i.e., electrorheological fluid-assisted micro-USM. This chapter briefs the audience with principles of electrorheological fluid-assisted micro-USM process.

One or several types of energy is superimposed on the conventional micromachining process in assisted variant of hybrid micromachining process. Energy from sources like laser, magnetic field, ultrasonic vibration, etc., are superimposed resulting in improved micromachining processes. The present chapter outlines and discusses some of the major assisted micromachining processes such as vibration-assisted variant of hybrid micromachining, external electric field assisted micromachining, and carbon nanofiber assisted micromachining processes.

In a combined variant of hybrid micromachining processes, the total material removal rate is accrued from the micromachining processes constituting the combined arrangement. The individual constituents simultaneously effect the machining zone. A number of advantages are associated with the combined hybrid micromachining processes such as enhanced material removal rate, higher dimensional tolerances, etc. The present chapter highlights and discusses some of the least explored combined hybrid micromachining processes: micro-electrochemical discharge machining, simultaneous micro-electrical discharge machining, and micro-electrochemical machining and micro-electrochemical machining and micro-mechanical grinding, micro-electrical discharge machining and laser micro-drilling and jet electrochemical machining and micro-EDM and electrorheological fluid-assisted polishing.