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Published in: Microsystem Technologies 8-9/2014

01-08-2014 | Technical Paper

Illumination and scattered light detection using a light source consisting of sub-micrometer defect arrays formed on a extremely flat light waveguide core

Authors: Toshifumi Ohkubo, Nobuyuki Terada, Yoshikazu Yoshida

Published in: Microsystem Technologies | Issue 8-9/2014

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Abstract

We have previously argued that an optical sensor combined total analysis system (TAS) is one of the indispensable functional components needed to realize a “ubiquitous human healthcare” system. To achieve this goal, we have proposed a fundamental structure for illuminating a minute cell or particle running along a microfluidic channel using a flat waveguide construction. It is desirable that the TAS light source should be arranged as close to the specimen flow as possible in order to acquire the necessary optical properties; hence, artificial defects formed on the surface of a flat light waveguide are considered to be a promising candidate for realizing the arbitrary-shaped light source for a highly functional optical TAS structure. Based on this idea, we fabricated a structure, constructing a flat and square light source consisting of rectangular solids, sub-micrometer in size, with a 1-μm thick and a 12-μm wide light waveguide core. We successfully trial-manufactured an optical TAS chip with a fluidic channel containing a 14 × 10-μm cross section, and an extremely flat light waveguide core. We repeatedly confirmed that the defect array could function as an approximately square light source when a 650-nm wavelength laser power was carefully introduced. Furthermore, we developed a hybrid numerical calculation method base on the finite-difference, time-domain method together with the beam propagation method. Utilizing this hybrid method, we evaluated the optical response when a particle runs across the light source while changing the aperture length of a shading mask to obtain signals with both higher intensity and shorter full width at half maximum. The numerical results were compared with experimental results obtained using an image acquisition system, and demonstrated good qualitative accord.

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Metadata
Title
Illumination and scattered light detection using a light source consisting of sub-micrometer defect arrays formed on a extremely flat light waveguide core
Authors
Toshifumi Ohkubo
Nobuyuki Terada
Yoshikazu Yoshida
Publication date
01-08-2014
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 8-9/2014
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-014-2132-9

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