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Published in: Advances in Manufacturing 2/2018

19-05-2018

In-situ stitching interferometric test system for large plano optics

Authors: Xin Wu, Ying-Jie Yu, Ke-Bing Mou, Wei-Rong Wang

Published in: Advances in Manufacturing | Issue 2/2018

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Abstract

In-situ testing is an ideal technology for improving the precision and efficiency of fabrication. We developed an in-situ subaperture stitching interferometric test system for large plano optics in the workshop environment with high precision and satisfactory repeatability. In this paper, we provide a brief account of this system and the principle of in-situ subaperture stitching measurement. Several validation tests are presented, which demonstrate that the developed system is capable of realizing in-situ testing. The size of optical flats can be measured is up to 420 mm × 780 mm, and repeatability is smaller than 0.03λ. The paper also discusses the necessary requirements for a suitable workshop environment for ensuring that the tests are stable and reliable.

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Metadata
Title
In-situ stitching interferometric test system for large plano optics
Authors
Xin Wu
Ying-Jie Yu
Ke-Bing Mou
Wei-Rong Wang
Publication date
19-05-2018
Publisher
Shanghai University
Published in
Advances in Manufacturing / Issue 2/2018
Print ISSN: 2095-3127
Electronic ISSN: 2195-3597
DOI
https://doi.org/10.1007/s40436-018-0220-2

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