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3D-Printed Sensor Array of Semiconducting Oxides Read chapter Read first chapter

2020 | OriginalPaper | Chapter

Influence of the Growth Temperature on the Properties of the Transparent and Conductive NiO Thin Films Obtained by RF Magnetron Sputtering

Authors : L. Ghimpu, V. Suman, D. Rusnac

Published in: 4th International Conference on Nanotechnologies and Biomedical Engineering

Publisher: Springer International Publishing

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Abstract

Transparent and conductive nickel oxide (NiO) thin films were deposited on the glass supports by magnetron pulverization (RF). The NiO thin films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), SEM equipped with X-ray detector-analyzer (EDX), UV-VIS spectroscopy and Hall measurements. XRD revealed that the NiO thin films obtained at different substrate temperatures are textured and possess a cubic crystalline structure. SEM analysis indicates the formation of the crystallites with a granular structure. The EDX spectra of the NiO thin films highlighted the presence of Ni and O as elementary components. With the increase of the substrate temperature from 50 to 450 °C Hall measurements show a decrease of the resistivity of the NiO thin layers due to the increase of the concentration and mobility of the free carriers.

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previous chapter Acetone Sensing Properties of Nanostructured Copper Oxide Films on Glass Substrate
next chapter Active Spectral Absorption Control in a Tunable Liquid Crystal/Metamaterial Structure by Polarization Plane Rotation
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Metadata
Title
Influence of the Growth Temperature on the Properties of the Transparent and Conductive NiO Thin Films Obtained by RF Magnetron Sputtering
Authors
L. Ghimpu
V. Suman
D. Rusnac
Copyright Year
2020
Book
4th International Conference on Nanotechnologies and Biomedical Engineering

Print ISBN: 978-3-030-31865-9

Electronic ISBN: 978-3-030-31866-6

Copyright Year: 2020

DOI
https://doi.org/10.1007/978-3-030-31866-6_57