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2006 | OriginalPaper | Chapter
Introduction to Micro-Systems and to the Techniques for Their Fabrication
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This chapter presents an introduction to the main manufacturing processes for micro-systems. After a brief historical overview of the field of microsystems, their main manufacturing techniques are reviewed. These include substrate preparation, photolithography, oxidation and diffusion, thin-film deposition, and wet and dry etching techniques. MEMS-specific processes including bulk- and surface-micromachining, LIGA, soft-lithography, and anodic bonding are also presented. The material is illustrated with multiple examples of process parameter calculation. Examples of MEMS devices fabricated in the laboratory of the author are also provided.