2018 | OriginalPaper | Chapter
Introduction
Author : Alexey Ivanov
Published in: Silicon Anodization as a Structuring Technique
Publisher: Springer Fachmedien Wiesbaden
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In the last decades, miniaturization of sensors and actuators opened new possibilities for applications of these devices in all fields of our lives. In order to fabricate such devices, different microstructuring techniques mostly coming from microelectronics technology are used. However, every technique is limited in choice of materials and achievable geometries, and often requires sophisticated and expensive equipment.