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Published in:

2022 | OriginalPaper | Chapter

1. Introduction

Author : Bernd Rauschenbach

Published in: Low-Energy Ion Irradiation of Materials

Publisher: Springer International Publishing

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Abstract

The first chapter places the modification of surfaces by low-energy ion bombardment in the context of modern surface modification techniques, formulates the requirements for a low-energy ion bombardment facility, outlines the main physical processes induced by low-energy ions, and points out some recent applications with low-energy ions that are beyond the scope of the book.

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next chapter Collision Processes
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Metadata
Title
Introduction
Author
Bernd Rauschenbach
Copyright Year
2022
Book
Low-Energy Ion Irradiation of Materials

Print ISBN: 978-3-030-97276-9

Electronic ISBN: 978-3-030-97277-6

Copyright Year: 2022

DOI
https://doi.org/10.1007/978-3-030-97277-6_1

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