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2016 | OriginalPaper | Chapter

1. Introduction

Author : Xiao-Sheng Zhang

Published in: Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

Publisher: Springer Berlin Heidelberg

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Abstract

This chapter mainly reviews the development road map of micro-/nanointegrated fabrication technology as well as the previous research work of micro-/nanohierarchical structures. Consequently, the motivation, purpose, and innovative contributions of this thesis are briefly summarized.

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next chapter Micro-/Nanointegrated Fabrication Technique for Silicon

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Title: Introduction
Author: Xiao-Sheng Zhang
Publisher: Springer Berlin Heidelberg
Book: Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting
Print ISBN: 978-3-662-48814-0

Electronic ISBN: 978-3-662-48816-4

Copyright Year: 2016
DOI: https://doi.org/10.1007/978-3-662-48816-4_1