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Journal of Systems Science and Systems Engineering

Issue 3/2023

Content (6 Articles)

DTFab: A Digital Twin based Approach for Optimal Reticle Management in Semiconductor Photolithography

Chandrasekhar Komaralingam Sivasubramanian, Robert Dodge, Aditya Ramani, David Bayba, Mani Janakiram, Eric Butcher, Joseph Gonzales, Giulia Pedrielli

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