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Published in:
Acoustic Microscopy Read chapter Read first chapter

2018 | OriginalPaper | Chapter

52. Laser Ionization Secondary Neutral Mass Spectrometry

Author : Tetsuo Sakamoto

Published in: Compendium of Surface and Interface Analysis

Publisher: Springer Singapore

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Abstract

Laser SNMS is a mass-selective surface imaging technique based on photo-ionization of sputtered neutrals originated in an ion beam irradiation on a solid sample. Atoms, occasionally molecules, are promoted and ionized through photon absorption.

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previous chapter Kelvin Probe Force Microscope
next chapter Laser Photoelectron Spectroscopy
Literature
1.
Sakamoto, T., Koizumi, M.: Resonance enhanced multi-photon ionization of neutral atoms sputtered with Ga-FIB. Appl. Surf. Sci. 255, 901–904 (2008)CrossRef
2.
Sakamoto, T., A new aspect of Laser-SNMS coupled with Ga FIB for polymer analysis, proceedings of SISS-15, 81–82 (2013)
3.
Ishikawa, T., Kashiwagi, T., Sakamoto, T., Misawa, K., Fujii, M., Hachiya, M., Noda, H., Endo, K.: Development of a Laser-SNMS instrument for nanoscale analysis and mapping of organic materials. Hyomen-Kagaku. 35, 383–388 (2014). (in Japanese)CrossRef
Metadata
Title
Laser Ionization Secondary Neutral Mass Spectrometry
Author
Tetsuo Sakamoto
Copyright Year
2018
Publisher
Springer Singapore
Book
Compendium of Surface and Interface Analysis

Print ISBN: 978-981-10-6155-4

Electronic ISBN: 978-981-10-6156-1

Copyright Year: 2018

DOI
https://doi.org/10.1007/978-981-10-6156-1_52

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