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Published in: Journal of Materials Science: Materials in Electronics 16/2018

27-06-2018

Light enhanced direct Cu bonding for advanced electronic assembly

Authors: Sin-Yong Liang, Jenn-Ming Song, Shang-Kun Huang, Ying-Ta Chiu, David Tarng, Chih-Pin Hung

Published in: Journal of Materials Science: Materials in Electronics | Issue 16/2018

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Abstract

An innovative and efficient surface modification pre-treatment that enhances Cu–Cu direct bonding through electromagnetic irradiation, including pulsed Xenon flash and near infrared rays is proposed. Without vacuum, short but critical electromagnetic radiation exposure on faying faces prior to bonding can significantly improve the joint strength up to 50% or even more. Copper atom diffusion acceleration by increased compressive residual surface stresses resulting from sudden heating/cooling accounts for the joint reinforcement. A close relationship between the increase in joint strength and the change in surface physics properties due to electromagnetic irradiations can be found.

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Metadata
Title
Light enhanced direct Cu bonding for advanced electronic assembly
Authors
Sin-Yong Liang
Jenn-Ming Song
Shang-Kun Huang
Ying-Ta Chiu
David Tarng
Chih-Pin Hung
Publication date
27-06-2018
Publisher
Springer US
Published in
Journal of Materials Science: Materials in Electronics / Issue 16/2018
Print ISSN: 0957-4522
Electronic ISSN: 1573-482X
DOI
https://doi.org/10.1007/s10854-018-9547-5

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