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2017 | OriginalPaper | Chapter

7. Materials Aspects of Micro- and Nanoelectromechanical Systems

Author : Christian A. Zorman

Published in: Springer Handbook of Nanotechnology

Publisher: Springer Berlin Heidelberg

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Abstract

One of the more significant technological achievements during the last twenty years has been the development of the field of microelectromechanical systems (MEMS) and its offshoot, nanoelectromechanical systems (NEMS). These developments were made possible by significant advancements in the materials and processing technologies used in the fabrication of MEMS and NEMS devices. While initial developments capitalized on a mature Si infrastructure built for the integrated circuit (IC) industry, recent advances have come about using materials and processes not typically associated with IC fabrication, a trend that is likely to continue as new application areas emerge.

A well-rounded understanding of MEMS and NEMS technology requires a basic knowledge of the materials used to construct the devices, since material properties often govern device performance and dictate fabrication approaches. An understanding of the materials used in MEMS and NEMS involves an understanding of material systems, since such devices are rarely constructed of a single material, but rather a collection of materials working in conjunction with each other to provide critical functions. It is from this perspective that the following chapter is constructed. This chapter is not a summary of all materials used in MEMS and NEMS, as such a work would itself constitute a single text of significant size. It does, however, present a selection of some of the more popular materials, as well as those that illustrate the importance of viewing MEMS and NEMS in terms of material systems.

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Title: Materials Aspects of Micro- and Nanoelectromechanical Systems
Author: Christian A. Zorman
Publisher: Springer Berlin Heidelberg
Book: Springer Handbook of Nanotechnology
Print ISBN: 978-3-662-54355-9

Electronic ISBN: 978-3-662-54357-3

Copyright Year: 2017
DOI: https://doi.org/10.1007/978-3-662-54357-3_7