MEMS integrated metamaterials with variable resonance operating at RF frequencies

Metamaterials are engineered materials with integrated structures designed to produce a resonant response at specific frequencies. The capacitive and inductive properties of metamaterials effect the overall refractive index of the media in which an RF signal propagates by generating a resonant frequency response. Incorporating microelectromechanical systems (MEMS) into the structure adds the ability to tune metamaterials and generate a variable resonance. In this investigation, a resonant response is achieved for the 1 – 4 GHz range with tuning. Employing processing techniques to create microelectronic devices, different metamaterial designs are fabricated on quartz substrates. Using these modifications, a design which provides the ideal shift in resonance is selected to incorporate into future RF systems. This paper reports on the modeling, design, fabrication and testing of various designs of metamaterials incorporated with MEMS.