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2017 | OriginalPaper | Chapter

8. Micro-scale Geometry Measurement

Authors : Samanta Piano, Rong Su, Richard Leach

Published in: Micro-Manufacturing Technologies and Their Applications

Publisher: Springer International Publishing

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Abstract

The ability to produce complex, high-precision, miniature components is key to the transition to high-value manufacturing. The advanced manufacturing industries, using precision machining techniques, such as diamond turning, injection moulding, micro-milling and micro-electro-discharge machining, currently have a number of capabilities for measuring small-scale structures with micro-scale tolerances, either with tactile or non-tactile systems. Metrology is essential for the reduction of dimensional tolerances, which allows the production of more efficient machines and the improvement of their longevity by reducing play or wear. In this chapter, contact and non-contact techniques that can be used to measure 3D features on the micro-metre scale are reviewed.

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Literature
1.
go back to reference Tosello G, Hansen HN, Marinello F, Gasparin S (2010) Replication and dimensional quality control of industrial nanoscale surfaces using calibrated AFM measurements and SEM image processing. Ann CIRP 59:563–568CrossRef Tosello G, Hansen HN, Marinello F, Gasparin S (2010) Replication and dimensional quality control of industrial nanoscale surfaces using calibrated AFM measurements and SEM image processing. Ann CIRP 59:563–568CrossRef
2.
go back to reference Fang FZ, Zhang XD, Weckenmann A, Zhang GX, Evans C (2013) Manufacturing and measurement of freeform optics. Ann CIRP 62:823–846CrossRef Fang FZ, Zhang XD, Weckenmann A, Zhang GX, Evans C (2013) Manufacturing and measurement of freeform optics. Ann CIRP 62:823–846CrossRef
3.
go back to reference ISO 25178 part 601 (2010) Geometrical product specifications (GPS)—surface texture: Areal–Part 601: Nominal characteristics of contact (stylus) instruments. International Organization for Standardization ISO 25178 part 601 (2010) Geometrical product specifications (GPS)—surface texture: Areal–Part 601: Nominal characteristics of contact (stylus) instruments. International Organization for Standardization
4.
go back to reference Leach RK (ed) (2014) Fundamental principles of engineering nanometrology, 2nd edn. Elsevier, Amsterdam Leach RK (ed) (2014) Fundamental principles of engineering nanometrology, 2nd edn. Elsevier, Amsterdam
5.
go back to reference Whitehouse DJ (2010) Handbook of surface and nanometrology, 2nd edn. CRC Press, Florida Whitehouse DJ (2010) Handbook of surface and nanometrology, 2nd edn. CRC Press, Florida
6.
go back to reference Thomas TR (1999) Rough surfaces, 2nd edn. Imperial College Press, London Thomas TR (1999) Rough surfaces, 2nd edn. Imperial College Press, London
7.
go back to reference Leach RK (2001) The measurement of surface texture using stylus instruments. NPL Good Practice Guide. National Physical Laboratory, UK Leach RK (2001) The measurement of surface texture using stylus instruments. NPL Good Practice Guide. National Physical Laboratory, UK
8.
go back to reference Radhakrishnan V (1970) Effect of stylus radius on the roughness value measured with tracing stylus instruments. Wear 16:325CrossRef Radhakrishnan V (1970) Effect of stylus radius on the roughness value measured with tracing stylus instruments. Wear 16:325CrossRef
9.
go back to reference McCool JI (1984) Assessing the effect of stylus tip radius and flight on surface topography measurements. ASME J Tribol 106:202–209CrossRef McCool JI (1984) Assessing the effect of stylus tip radius and flight on surface topography measurements. ASME J Tribol 106:202–209CrossRef
10.
go back to reference Mendeleyev V (1997) Dependence of measuring errors of rms roughness on stylus tip size for mechanical profilers. Appl Opt 36:9005–9009CrossRef Mendeleyev V (1997) Dependence of measuring errors of rms roughness on stylus tip size for mechanical profilers. Appl Opt 36:9005–9009CrossRef
11.
go back to reference Lee C-O, Park K, Park BC, Lee YW (2005) An algorithm for stylus instruments to measure aspheric surfaces. Meas Sci Technol 16:1215CrossRef Lee C-O, Park K, Park BC, Lee YW (2005) An algorithm for stylus instruments to measure aspheric surfaces. Meas Sci Technol 16:1215CrossRef
12.
go back to reference Lee DH (2013) 3-dimensional profile distortion measured by stylus type. Measurement 46:803–814CrossRef Lee DH (2013) 3-dimensional profile distortion measured by stylus type. Measurement 46:803–814CrossRef
13.
go back to reference Fang H, Xu B, Chen W, Tang H, Zhao S (2015) A slope-adapted sample-tilting method for profile measurement of microstructures with steep surfaces. J Nanomater ID 253062 (in press) Fang H, Xu B, Chen W, Tang H, Zhao S (2015) A slope-adapted sample-tilting method for profile measurement of microstructures with steep surfaces. J Nanomater ID 253062 (in press)
14.
go back to reference Hocken RJ, Pereira PH (eds) (2011) Coordinate measuring machines and systems, 2nd edn. CRC Press, New York Hocken RJ, Pereira PH (eds) (2011) Coordinate measuring machines and systems, 2nd edn. CRC Press, New York
15.
go back to reference ISO 10360 part 3 (2000) Geometrical product specifications (GPS)—acceptance and reverification tests for coordinate measuring machines (CMM)—Part 3: CMMs with the axis of a rotary table as the fourth axis. International Organization for Standardization ISO 10360 part 3 (2000) Geometrical product specifications (GPS)—acceptance and reverification tests for coordinate measuring machines (CMM)—Part 3: CMMs with the axis of a rotary table as the fourth axis. International Organization for Standardization
16.
go back to reference Vermeulen MMPA, Rosielle PCJN, Schellekens PHJ (1998) Design of a high-precision 3D-coordinate measuring machine. Ann CIRP 47:447–450CrossRef Vermeulen MMPA, Rosielle PCJN, Schellekens PHJ (1998) Design of a high-precision 3D-coordinate measuring machine. Ann CIRP 47:447–450CrossRef
17.
go back to reference Widdershoven I, Donker RL, Spaan HAM (2011) Realization and calibration of the “Isara 400” ultra-precision CMM. J Phys: Conf Ser 311:012002 Widdershoven I, Donker RL, Spaan HAM (2011) Realization and calibration of the “Isara 400” ultra-precision CMM. J Phys: Conf Ser 311:012002
18.
go back to reference Jäger G, Manske E, Hausotte T, Büchner H-J, Grünwald R, Schott W (2001) Nanomeasuring technology—nanomeasuring machine. In: Proceedings of the ASPE, Crystal City, VA, Nov. 2001, pp 23–27 Jäger G, Manske E, Hausotte T, Büchner H-J, Grünwald R, Schott W (2001) Nanomeasuring technology—nanomeasuring machine. In: Proceedings of the ASPE, Crystal City, VA, Nov. 2001, pp 23–27
19.
go back to reference Leach RK (2015) Abbe error/offset. In: Laperrière L, Reinhart G (eds) CIRP encyclopaedia of production engineering. Springer, Berlin Leach RK (2015) Abbe error/offset. In: Laperrière L, Reinhart G (eds) CIRP encyclopaedia of production engineering. Springer, Berlin
20.
go back to reference Fan K-C, Fei Y-T, Wang W, Chen Y, Chen Y-C (2008) Micro-CMM. In: Smart devices and machines for advanced manufacturing, pp 319–335 Fan K-C, Fei Y-T, Wang W, Chen Y, Chen Y-C (2008) Micro-CMM. In: Smart devices and machines for advanced manufacturing, pp 319–335
21.
go back to reference Claverley JD, Leach RK (2015) A review of the existing performance verification infrastructure for micro-CMMs. Precis Eng 39:1–15CrossRef Claverley JD, Leach RK (2015) A review of the existing performance verification infrastructure for micro-CMMs. Precis Eng 39:1–15CrossRef
22.
go back to reference ISO 10360 part 1 (2001) Geometrical product specifications (GPS)—acceptance and reverification tests for coordinate measuring machines (CMM). International Organization for Standardization ISO 10360 part 1 (2001) Geometrical product specifications (GPS)—acceptance and reverification tests for coordinate measuring machines (CMM). International Organization for Standardization
23.
go back to reference Weckenmann A, Estler T, Peggs G, McMurtry D (2004) Probing systems in dimensional metrology. Ann CIRP 53:657–684CrossRef Weckenmann A, Estler T, Peggs G, McMurtry D (2004) Probing systems in dimensional metrology. Ann CIRP 53:657–684CrossRef
24.
go back to reference Küng A, Meli F, Thalmann R (2007) Ultraprecision micro-CMM using a low force 3D touch probe. Measur Sci Technol 18:319–327CrossRef Küng A, Meli F, Thalmann R (2007) Ultraprecision micro-CMM using a low force 3D touch probe. Measur Sci Technol 18:319–327CrossRef
25.
go back to reference Chu C-L, Chiu C-Y (2007) Development of a low-cost nanoscale touch trigger probe based on two commercial DVD pick-up heads. Measur Sci Technol 18:1831–1842CrossRef Chu C-L, Chiu C-Y (2007) Development of a low-cost nanoscale touch trigger probe based on two commercial DVD pick-up heads. Measur Sci Technol 18:1831–1842CrossRef
26.
go back to reference Haitjema H, Pril WO, Schellekens PHJ (2001) Development of a silicon-based nanoprobe system for 3-D measurements. Ann CIRP 50:365–368CrossRef Haitjema H, Pril WO, Schellekens PHJ (2001) Development of a silicon-based nanoprobe system for 3-D measurements. Ann CIRP 50:365–368CrossRef
27.
go back to reference Brand U, Kleine-Besten T, Schwenke H (2000) Development of a special CMM for dimensional metrology on microsystem components. In: Proceedings of the ASPE, Scottsdale, AZ, Oct. 2000, pp 542–546 Brand U, Kleine-Besten T, Schwenke H (2000) Development of a special CMM for dimensional metrology on microsystem components. In: Proceedings of the ASPE, Scottsdale, AZ, Oct. 2000, pp 542–546
28.
go back to reference Ruther P, Bartholomeyczik J, Trautmann A, Wandt M, Pau O, Dominicus W, Roth R, Seitz K, Strauss W (2005) Novel 3D piezoresistive silicon force sensor for dimensional metrology of micro components. In: Proceedings of the IEEE sensor, pp 1006–1009 Ruther P, Bartholomeyczik J, Trautmann A, Wandt M, Pau O, Dominicus W, Roth R, Seitz K, Strauss W (2005) Novel 3D piezoresistive silicon force sensor for dimensional metrology of micro components. In: Proceedings of the IEEE sensor, pp 1006–1009
29.
go back to reference Dai G, Bütefisch S, Pohlenz F, Danzebrink H-U (2009) A high precision micro/nano CMM using piezoresistive tactile probes. Measur Sci Technol 20:084001CrossRef Dai G, Bütefisch S, Pohlenz F, Danzebrink H-U (2009) A high precision micro/nano CMM using piezoresistive tactile probes. Measur Sci Technol 20:084001CrossRef
30.
go back to reference Muralikrishnan B, Stone J, Stoup J (2007) Roundness measurements using the NIST fibre probe. In: Proceedings of the ASPE, Dallas, TX, Oct. 2007, pp 89–92 Muralikrishnan B, Stone J, Stoup J (2007) Roundness measurements using the NIST fibre probe. In: Proceedings of the ASPE, Dallas, TX, Oct. 2007, pp 89–92
31.
go back to reference Takaya Y, Takahashi S, Miyoshi T, Saito K (1999) Development of the nano-CMM probe based on laser trapping technology. Ann CIRP 48:421–424CrossRef Takaya Y, Takahashi S, Miyoshi T, Saito K (1999) Development of the nano-CMM probe based on laser trapping technology. Ann CIRP 48:421–424CrossRef
32.
go back to reference Seugling R, Darnell I (2008) Investigating scaling limits of a fibre based resonant probe for metrology applications. In: Proceedings of the ASPE, Livermore, CA, Oct. 2008 Seugling R, Darnell I (2008) Investigating scaling limits of a fibre based resonant probe for metrology applications. In: Proceedings of the ASPE, Livermore, CA, Oct. 2008
33.
go back to reference Claverley JD, Leach RK (2013) Development of a three-dimensional vibrating tactile probe for miniature CMMs. Precis Eng 37:491–499CrossRef Claverley JD, Leach RK (2013) Development of a three-dimensional vibrating tactile probe for miniature CMMs. Precis Eng 37:491–499CrossRef
34.
go back to reference Lee ES, Burdekin M (2001) A hole plate artifact design for volumetric error calibration of a CMM. Int J Adv Manuf Technol 17:508–515CrossRef Lee ES, Burdekin M (2001) A hole plate artifact design for volumetric error calibration of a CMM. Int J Adv Manuf Technol 17:508–515CrossRef
35.
go back to reference Schwenke H, Franke M, Hannaford J, Kunzmann H (2005) Error mapping of CMMs and machine tools by a single tracking interferometer. Ann CIRP 54:475–478CrossRef Schwenke H, Franke M, Hannaford J, Kunzmann H (2005) Error mapping of CMMs and machine tools by a single tracking interferometer. Ann CIRP 54:475–478CrossRef
36.
go back to reference Schwenke H, Knapp W, Haitjema H, Weckenmann A, Schmitt R, Delbressine F (2008) Geometric error measurement and compensation for machines—an update. Ann CIRP 57:660–675CrossRef Schwenke H, Knapp W, Haitjema H, Weckenmann A, Schmitt R, Delbressine F (2008) Geometric error measurement and compensation for machines—an update. Ann CIRP 57:660–675CrossRef
37.
go back to reference Zhang G, Veale R, Charlton T, Borchardt B, Hocken R (1985) Error compensation of coordinate measuring machines. Ann CIRP 34:445–448CrossRef Zhang G, Veale R, Charlton T, Borchardt B, Hocken R (1985) Error compensation of coordinate measuring machines. Ann CIRP 34:445–448CrossRef
38.
go back to reference Krutha J-P, Vanhercka P, Van den Bergha C (2001) Compensation of static and transient thermal errors on CMMs. Ann CIRP 50:377–380CrossRef Krutha J-P, Vanhercka P, Van den Bergha C (2001) Compensation of static and transient thermal errors on CMMs. Ann CIRP 50:377–380CrossRef
39.
go back to reference Aggogeri F, Barbato G, Barini EM, Genta G, Levi R (2011) Measurement uncertainty assessment of coordinate measuring machines by simulation and planned experimentation. CIRP-JMST 4:51–56 Aggogeri F, Barbato G, Barini EM, Genta G, Levi R (2011) Measurement uncertainty assessment of coordinate measuring machines by simulation and planned experimentation. CIRP-JMST 4:51–56
40.
go back to reference ISO 10360 part 6 (2001) Geometrical product specifications (GPS)—acceptance and reverification tests for coordinate measuring machines (CMM)—Part 6: estimation of errors in computing Gaussian associated features. International Organization for Standardization ISO 10360 part 6 (2001) Geometrical product specifications (GPS)—acceptance and reverification tests for coordinate measuring machines (CMM)—Part 6: estimation of errors in computing Gaussian associated features. International Organization for Standardization
41.
go back to reference Danzl R, Helmli F, Rubert P, Prantl M (2008) Optical roughness measurements on specially designed roughness standards. Proc SPIE 7102:71020MCrossRef Danzl R, Helmli F, Rubert P, Prantl M (2008) Optical roughness measurements on specially designed roughness standards. Proc SPIE 7102:71020MCrossRef
42.
go back to reference Hemli F (2011) Focus-variation instruments. In: Leach RK (ed) Optical measurement of surface topography. Springer, Berlin Hemli F (2011) Focus-variation instruments. In: Leach RK (ed) Optical measurement of surface topography. Springer, Berlin
43.
go back to reference Scherer S (2007) Focus-variation for optical 3D measurement in the micro- and nano-range. In: Bauer N (ed) Handbuch zur Industriellen Bildverarbeitung. Fraunhofer IRB Verlag, Stuttgart Scherer S (2007) Focus-variation for optical 3D measurement in the micro- and nano-range. In: Bauer N (ed) Handbuch zur Industriellen Bildverarbeitung. Fraunhofer IRB Verlag, Stuttgart
44.
go back to reference Zhang Y, Zhang Y, Wen CY (2000) A new focus measure method using moments. Image Vision Comput 18:959–965CrossRef Zhang Y, Zhang Y, Wen CY (2000) A new focus measure method using moments. Image Vision Comput 18:959–965CrossRef
45.
go back to reference Helmli FS, Scherer S (2001) Adaptive shape from focus with an error estimation in light microscopy. In: ISPA 2001, Pula, Croatia, June 2001, pp 188–193 Helmli FS, Scherer S (2001) Adaptive shape from focus with an error estimation in light microscopy. In: ISPA 2001, Pula, Croatia, June 2001, pp 188–193
46.
go back to reference Danzl R, Helmli F, Scherer S (2011) Focus variation—a robust technology for high resolution optical 3D surface metrology. J Mech Eng 57:245–256CrossRef Danzl R, Helmli F, Scherer S (2011) Focus variation—a robust technology for high resolution optical 3D surface metrology. J Mech Eng 57:245–256CrossRef
47.
go back to reference ISO 25178 part 604 (2001) Geometrical product specification (GPS)—surface texture: Areal–Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments. International Organization for Standardization ISO 25178 part 604 (2001) Geometrical product specification (GPS)—surface texture: Areal–Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments. International Organization for Standardization
48.
go back to reference de Groot P (2011) Coherence scanning interferometry. In: Leach RK (ed) Optical measurement of surface topography, vol 9. Springer, Berlin de Groot P (2011) Coherence scanning interferometry. In: Leach RK (ed) Optical measurement of surface topography, vol 9. Springer, Berlin
49.
go back to reference de Groot P (2015) Principles of interference microscopy for the measurement of surface topography. Adv Opt Photon 7:1–65CrossRef de Groot P (2015) Principles of interference microscopy for the measurement of surface topography. Adv Opt Photon 7:1–65CrossRef
50.
go back to reference de Groot P, Colonna de Lega X, Kramer J, Turzhitsky M (2002) Determination of fringe order in white-light interference microscopy. Appl Opt 41:4571–4578CrossRef de Groot P, Colonna de Lega X, Kramer J, Turzhitsky M (2002) Determination of fringe order in white-light interference microscopy. Appl Opt 41:4571–4578CrossRef
51.
go back to reference Colonna de Lega X, Biegen J, de Groot P, Häusler G, Andretzky P (2003) Large field-of-view scanning white-light interferometers. In: Proceedings of the ASPE, Portland, OR, Oct. 2003, p 1275 Colonna de Lega X, Biegen J, de Groot P, Häusler G, Andretzky P (2003) Large field-of-view scanning white-light interferometers. In: Proceedings of the ASPE, Portland, OR, Oct. 2003, p 1275
52.
go back to reference Wyant JC, Schmit J (1998) Large field of view, high spatial resolution, surface measurements. Int J Mach Tools Manuf 38:691–698CrossRef Wyant JC, Schmit J (1998) Large field of view, high spatial resolution, surface measurements. Int J Mach Tools Manuf 38:691–698CrossRef
53.
go back to reference Gao F, Leach RK, Petzing J, Coupland JM (2008) Surface measurement errors using commercial scanning white light interferometers. Measur Sci Technol 19:015303CrossRef Gao F, Leach RK, Petzing J, Coupland JM (2008) Surface measurement errors using commercial scanning white light interferometers. Measur Sci Technol 19:015303CrossRef
54.
go back to reference Schwider J, Zhou L (1994) Dispersive interferometric profilometer. Opt Lett 19:995–997CrossRef Schwider J, Zhou L (1994) Dispersive interferometric profilometer. Opt Lett 19:995–997CrossRef
55.
go back to reference Marron JC, Gleichman KW (2000) Three-dimensional imaging using a tunable laser source. Opt Eng 39:47–51CrossRef Marron JC, Gleichman KW (2000) Three-dimensional imaging using a tunable laser source. Opt Eng 39:47–51CrossRef
56.
go back to reference Jiang X (2012) Precision surface measurement. Phil Trans R Soc A 370:4089–4114CrossRef Jiang X (2012) Precision surface measurement. Phil Trans R Soc A 370:4089–4114CrossRef
57.
go back to reference Paz VF, Peterhänsel S, Frenner K, Osten W (2012) Solving the inverse grating problem by white light interference Fourier scatterometry. Light: Sci Appl 1:e36 Paz VF, Peterhänsel S, Frenner K, Osten W (2012) Solving the inverse grating problem by white light interference Fourier scatterometry. Light: Sci Appl 1:e36
58.
go back to reference Colonna de Lega X, de Groot P (2005) Optical topography measurement of patterned wafers. AIP Conf Proc 788:432–436CrossRef Colonna de Lega X, de Groot P (2005) Optical topography measurement of patterned wafers. AIP Conf Proc 788:432–436CrossRef
59.
go back to reference Minsky M (1961) Microscopy apparatus. US patent, vol US3013467A Minsky M (1961) Microscopy apparatus. US patent, vol US3013467A
60.
go back to reference Minsky M (1988) Memoir on inventing the confocal microscope. Scanning 10:128–138CrossRef Minsky M (1988) Memoir on inventing the confocal microscope. Scanning 10:128–138CrossRef
61.
go back to reference Wilson T (ed) (1990) Confocal microscopy. Academic Press, London Wilson T (ed) (1990) Confocal microscopy. Academic Press, London
62.
go back to reference Diaspro A (ed) (2002) Confocal and two—photon microscopy: foundations, applications, and advances. Wiley-Liss, New York Diaspro A (ed) (2002) Confocal and two—photon microscopy: foundations, applications, and advances. Wiley-Liss, New York
63.
64.
go back to reference Artigas R (2001) Imaging confocal microscopy. In: Leach RK (ed) Optical measurement of surface topography. Springer, Berlin Artigas R (2001) Imaging confocal microscopy. In: Leach RK (ed) Optical measurement of surface topography. Springer, Berlin
65.
go back to reference Semwogere D, Weeks ER (2005) Confocal microscopy. In: Encyclopedia of biomaterials and biomedical engineering. Taylor&Francis, London Semwogere D, Weeks ER (2005) Confocal microscopy. In: Encyclopedia of biomaterials and biomedical engineering. Taylor&Francis, London
66.
go back to reference Brakenhoff GJ, Blom P, Barends P (1976) Confocal scanning light microscopy with high aperture immersion lenses. J Microsc 117:21932 Brakenhoff GJ, Blom P, Barends P (1976) Confocal scanning light microscopy with high aperture immersion lenses. J Microsc 117:21932
67.
go back to reference Wilson T (2011) Resolution and optical sectioning in the confocal microscope. J Microsc 244:113–121CrossRef Wilson T (2011) Resolution and optical sectioning in the confocal microscope. J Microsc 244:113–121CrossRef
68.
go back to reference Leach RK (ed) (2011) Optical measurement of surface topography. Springer, Berlin, Germany Leach RK (ed) (2011) Optical measurement of surface topography. Springer, Berlin, Germany
69.
go back to reference Muralikrishnan B, Ren W, Everett D, Stanfield E, Doiron T (2011) Dimensional metrology of bipolar fuel cell plates using laser spot triangulation probes. Meas Sci Technol 22:075102CrossRef Muralikrishnan B, Ren W, Everett D, Stanfield E, Doiron T (2011) Dimensional metrology of bipolar fuel cell plates using laser spot triangulation probes. Meas Sci Technol 22:075102CrossRef
70.
go back to reference Kjaer KH, Ottose C-O (2015) 3D laser triangulation for plant phenotyping in challenging environments. Sensors 15:13533–13547CrossRef Kjaer KH, Ottose C-O (2015) 3D laser triangulation for plant phenotyping in challenging environments. Sensors 15:13533–13547CrossRef
71.
go back to reference Peiravi A, Taabbodi B (2010) A reliable 3D laser triangulation-based scanner with a new simple but accurate procedure for finding scanner parameters. J Am Sci 6:80 Peiravi A, Taabbodi B (2010) A reliable 3D laser triangulation-based scanner with a new simple but accurate procedure for finding scanner parameters. J Am Sci 6:80
72.
go back to reference Clarke TA, Grattan KTV, Lindsey NE (1991) Laser-based triangulation techniques in optical inspection of industrial structures. Proc SPIE 1332:474–486CrossRef Clarke TA, Grattan KTV, Lindsey NE (1991) Laser-based triangulation techniques in optical inspection of industrial structures. Proc SPIE 1332:474–486CrossRef
73.
go back to reference MacKinnon D, Beraldin J-A, Cournoyer L, Picard M, Blais F (2012) Lateral resolution challenges for triangulation-based three-dimensional imaging systems. Opt Eng 51:021111CrossRef MacKinnon D, Beraldin J-A, Cournoyer L, Picard M, Blais F (2012) Lateral resolution challenges for triangulation-based three-dimensional imaging systems. Opt Eng 51:021111CrossRef
74.
go back to reference Zeng L, Matsumoto H, Kawachi K (1997) Two-directional scanning method for reducing the shadow effects in laser triangulation. Measur Sci Technol 8:262–266CrossRef Zeng L, Matsumoto H, Kawachi K (1997) Two-directional scanning method for reducing the shadow effects in laser triangulation. Measur Sci Technol 8:262–266CrossRef
75.
go back to reference Gorthi SS, Rastogi P (2010) Fringe projection techniques: whither we are? Opt Lasers Eng 48(2):133–140CrossRef Gorthi SS, Rastogi P (2010) Fringe projection techniques: whither we are? Opt Lasers Eng 48(2):133–140CrossRef
76.
go back to reference Leonhardt K, Droste U, Tiziani HJ (1994) Micro shape and rough-surface analysis by fringe projection. Appl Opt 33:7477–7488CrossRef Leonhardt K, Droste U, Tiziani HJ (1994) Micro shape and rough-surface analysis by fringe projection. Appl Opt 33:7477–7488CrossRef
77.
go back to reference Quan C, Tay CJ, He XY, Kang X, Shang HM (2002) Microscopic surface contouring by fringe projection method. Opt Laser Technol 34(7):547–552CrossRef Quan C, Tay CJ, He XY, Kang X, Shang HM (2002) Microscopic surface contouring by fringe projection method. Opt Laser Technol 34(7):547–552CrossRef
78.
go back to reference Chen L-C, Liao C-C, Lai M-J (2005) Full-field micro surface profilometry using digital fringe projection with spatial encoding principle. J Phys: Conf Series 13:147–150 Chen L-C, Liao C-C, Lai M-J (2005) Full-field micro surface profilometry using digital fringe projection with spatial encoding principle. J Phys: Conf Series 13:147–150
79.
go back to reference He X, Sun W, Zheng X, Nie M (2006) Static and dynamic deformation measurements of micro beams by the technique of digital image correlation. Key Eng Mater 326–328:211–214CrossRef He X, Sun W, Zheng X, Nie M (2006) Static and dynamic deformation measurements of micro beams by the technique of digital image correlation. Key Eng Mater 326–328:211–214CrossRef
80.
go back to reference Chen L, Chang Y (2008) High accuracy confocal full-field 3-D surface profilometry for micro lenses using a digital fringe projection strategy. Key Eng Mater 364–366:113–116 Chen L, Chang Y (2008) High accuracy confocal full-field 3-D surface profilometry for micro lenses using a digital fringe projection strategy. Key Eng Mater 364–366:113–116
81.
go back to reference Li A, Peng X, Yina Y, Liua X, Zhao Q, Körner K, Osten W (2013) Fringe projection based quantitative 3D microscopy. Optik 124:5052–5056CrossRef Li A, Peng X, Yina Y, Liua X, Zhao Q, Körner K, Osten W (2013) Fringe projection based quantitative 3D microscopy. Optik 124:5052–5056CrossRef
82.
go back to reference Yin Y, Wang M, Gao BZ, Liu X, Peng X (2015) Fringe projection 3D microscopy with the general imaging model. Opt Express 23:6846CrossRef Yin Y, Wang M, Gao BZ, Liu X, Peng X (2015) Fringe projection 3D microscopy with the general imaging model. Opt Express 23:6846CrossRef
83.
go back to reference Chen J, Guo T, Wang L, Wu Z, Fu X, Hu X (2013) Microscopic fringe projection system and measuring method. Proc SPIE 8759:87594UCrossRef Chen J, Guo T, Wang L, Wu Z, Fu X, Hu X (2013) Microscopic fringe projection system and measuring method. Proc SPIE 8759:87594UCrossRef
84.
go back to reference Drexler W, Fujimoto JG (eds) (2008) Optical coherence tomography: technology and applications. Springer, Berlin Drexler W, Fujimoto JG (eds) (2008) Optical coherence tomography: technology and applications. Springer, Berlin
85.
go back to reference Stifter D (2007) Beyond biomedicine: a review of alternative applications and developments for optical coherence tomography. Appl Phys B 88:337–357CrossRef Stifter D (2007) Beyond biomedicine: a review of alternative applications and developments for optical coherence tomography. Appl Phys B 88:337–357CrossRef
86.
go back to reference Guan G, Hirsch M, Lu ZH, Childs DT, Matcher SJ, Goodridge R, Groom KM, Clare AT (2015) Evaluation of selective laser sintering processes by optical coherence tomography. J: Mater Design (accepted) Guan G, Hirsch M, Lu ZH, Childs DT, Matcher SJ, Goodridge R, Groom KM, Clare AT (2015) Evaluation of selective laser sintering processes by optical coherence tomography. J: Mater Design (accepted)
87.
go back to reference Wieser W, Biedermann BR, Klein T, Eigenwillig CM, Huber R (2010) Multi-megahertz OCT: high quality 3D imaging at 20 million A-scans and 4.5 GVoxels per second. Opt Express 18:14685–14704CrossRef Wieser W, Biedermann BR, Klein T, Eigenwillig CM, Huber R (2010) Multi-megahertz OCT: high quality 3D imaging at 20 million A-scans and 4.5 GVoxels per second. Opt Express 18:14685–14704CrossRef
88.
go back to reference Czajkowski J, Vilmi P, Lauri J, Sliz R, Fabritius T, Myllylä R (2012) Characterization of ink-jet printed RGB color filters with spectral domain optical coherence tomography. Proc SPIE 8496:849308CrossRef Czajkowski J, Vilmi P, Lauri J, Sliz R, Fabritius T, Myllylä R (2012) Characterization of ink-jet printed RGB color filters with spectral domain optical coherence tomography. Proc SPIE 8496:849308CrossRef
89.
go back to reference Thrane L, Jørgensen TM, Jørgensen M, Krebs FC (2012) Application of optical coherence tomography (OCT) as a 3-dimensional imaging technique for roll-to-roll coated polymer solar cells. Solar Energy Mater Solar Cells 97:181–185CrossRef Thrane L, Jørgensen TM, Jørgensen M, Krebs FC (2012) Application of optical coherence tomography (OCT) as a 3-dimensional imaging technique for roll-to-roll coated polymer solar cells. Solar Energy Mater Solar Cells 97:181–185CrossRef
90.
go back to reference Su R, Kirillin M, Ekberg P, Mattsson L (2015) Three-dimensional metrology of embedded microfeatures in ceramics by infra-red optical coherence tomography—advantages and limitations. In: Proceedings of the 11th LAMDAMAP, March 2015. Swindon, UK, pp 74–83 Su R, Kirillin M, Ekberg P, Mattsson L (2015) Three-dimensional metrology of embedded microfeatures in ceramics by infra-red optical coherence tomography—advantages and limitations. In: Proceedings of the 11th LAMDAMAP, March 2015. Swindon, UK, pp 74–83
91.
go back to reference Ahn Y, Jung W, Chen Z (2008) Optical sectioning for microfluidics: secondary flow and mixing in a meandering microchannel. Lab Chip 8:125–133CrossRef Ahn Y, Jung W, Chen Z (2008) Optical sectioning for microfluidics: secondary flow and mixing in a meandering microchannel. Lab Chip 8:125–133CrossRef
92.
go back to reference Stifter D, Leiss-Holzinger E, Major Z, Baumann B, Pircher M, Götzinger E, Hitzenberger CK, Heise B (2010) Dynamic optical studies in materials testing with spectral-domain polarization-sensitive optical coherence tomography. Opt Express 18:25712–25725CrossRef Stifter D, Leiss-Holzinger E, Major Z, Baumann B, Pircher M, Götzinger E, Hitzenberger CK, Heise B (2010) Dynamic optical studies in materials testing with spectral-domain polarization-sensitive optical coherence tomography. Opt Express 18:25712–25725CrossRef
93.
go back to reference Dubois A, Grieve K, Moneron G, Lecaque R, Vabre L, Boccara C (2004) Ultrahigh-resolution full-field optical coherence tomography. Appl Opt 43:2874–2883CrossRef Dubois A, Grieve K, Moneron G, Lecaque R, Vabre L, Boccara C (2004) Ultrahigh-resolution full-field optical coherence tomography. Appl Opt 43:2874–2883CrossRef
94.
go back to reference Chen T, Zhang N, Huo T, Wang C, Zheng J, Zhou T, Xue P (2013) Tiny endoscopic optical coherence tomography probe driven by a miniaturized hollow ultrasonic motor. J Biomed Opt 18:086011CrossRef Chen T, Zhang N, Huo T, Wang C, Zheng J, Zhou T, Xue P (2013) Tiny endoscopic optical coherence tomography probe driven by a miniaturized hollow ultrasonic motor. J Biomed Opt 18:086011CrossRef
95.
go back to reference Prylepa A, Duchoslav J, Keppert T, Luckeneder G, Stellnberger K-H, Stifter D (2013) Nonlinear imaging with interferometric SHG microscopy using a broadband 1550 nm fs-fiber laser. In: CLEO EUROPE/IQEC, Munich, Germany, May 2013, p 1 Prylepa A, Duchoslav J, Keppert T, Luckeneder G, Stellnberger K-H, Stifter D (2013) Nonlinear imaging with interferometric SHG microscopy using a broadband 1550 nm fs-fiber laser. In: CLEO EUROPE/IQEC, Munich, Germany, May 2013, p 1
96.
go back to reference Su R, Kirillin M, Chang EW, Sergeeva E, Yun SH, Mattsson L (2014) Perspectives of mid-infrared optical coherence tomography for inspection and micrometrology of industrial ceramics. Opt Express 22:15804–15819CrossRef Su R, Kirillin M, Chang EW, Sergeeva E, Yun SH, Mattsson L (2014) Perspectives of mid-infrared optical coherence tomography for inspection and micrometrology of industrial ceramics. Opt Express 22:15804–15819CrossRef
97.
go back to reference Schmitt JM, Xiang SH, Yung KM (1999) Speckle in optical coherence tomography. J Biomed Opt 4:95–105CrossRef Schmitt JM, Xiang SH, Yung KM (1999) Speckle in optical coherence tomography. J Biomed Opt 4:95–105CrossRef
98.
go back to reference Hitzenberger CK, Baumgartner A, Fercher AF (1998) Dispersion in-duced multiple signal peak splitting in partial coherence interferometry. Opt Commun 154:179–185CrossRef Hitzenberger CK, Baumgartner A, Fercher AF (1998) Dispersion in-duced multiple signal peak splitting in partial coherence interferometry. Opt Commun 154:179–185CrossRef
99.
go back to reference Su R, Ekberg P, Leitner M, Mattsson L (2014) Accurate and automated image segmentation of 3D optical coherence tomography data suffering from low signal-to-noise levels. J Opt Soc Am A 31:2551–2560CrossRef Su R, Ekberg P, Leitner M, Mattsson L (2014) Accurate and automated image segmentation of 3D optical coherence tomography data suffering from low signal-to-noise levels. J Opt Soc Am A 31:2551–2560CrossRef
100.
go back to reference Chiffre LD, Carmignato S, Kruth J-P, Schmit R, Wecken-mann A (2014) Industrial applications of computed tomography. Ann CIRP 63:655–677CrossRef Chiffre LD, Carmignato S, Kruth J-P, Schmit R, Wecken-mann A (2014) Industrial applications of computed tomography. Ann CIRP 63:655–677CrossRef
101.
go back to reference Kruth JP, Bartscher M, Carmignato S, Schmitt R, Chiffre LD, Weckenmannf A (2011) Computed tomography for dimensional metrology. Ann CIRP 60:821–842CrossRef Kruth JP, Bartscher M, Carmignato S, Schmitt R, Chiffre LD, Weckenmannf A (2011) Computed tomography for dimensional metrology. Ann CIRP 60:821–842CrossRef
102.
go back to reference Hsieh J (2009) Computed tomography: principles, design, artifacts, and recent advances, 2nd edn. SPIE Press, Bellingham Hsieh J (2009) Computed tomography: principles, design, artifacts, and recent advances, 2nd edn. SPIE Press, Bellingham
103.
go back to reference Boone JM (2000) X-ray production, interaction, and detection in diagnostic imaging. In: Beutel J, Kundel HL, Van Metter RL (eds) Handbook of medical imaging, physics and psychophysics. SPIE Press, Bellingham, pp 1–78 Boone JM (2000) X-ray production, interaction, and detection in diagnostic imaging. In: Beutel J, Kundel HL, Van Metter RL (eds) Handbook of medical imaging, physics and psychophysics. SPIE Press, Bellingham, pp 1–78
104.
go back to reference Requena G, Cloetens P, Altendorfer W, Poletti C, Tolnai D, Warchomickaa F, Degischera HP (2009) Sub-micrometer synchrotron tomography of multiphase metals using Kirkpatrick-Baez optics. Scripta Mater 61:760–763CrossRef Requena G, Cloetens P, Altendorfer W, Poletti C, Tolnai D, Warchomickaa F, Degischera HP (2009) Sub-micrometer synchrotron tomography of multiphase metals using Kirkpatrick-Baez optics. Scripta Mater 61:760–763CrossRef
105.
go back to reference Yaffe MJ, Rowlands JA (1997) X-ray detectors for digital radiography. Phys Med Biol 42:1–39CrossRef Yaffe MJ, Rowlands JA (1997) X-ray detectors for digital radiography. Phys Med Biol 42:1–39CrossRef
106.
go back to reference Smith BD (1990) Cone-beam tomography: recent advances and a tutorial review. Opt Eng 29:524–534CrossRef Smith BD (1990) Cone-beam tomography: recent advances and a tutorial review. Opt Eng 29:524–534CrossRef
107.
go back to reference Ferrucci M, Leach RK, Giusca C, Carmignato S, Dewulf W (2015) Towards geometrical calibration of x-ray computed tomography systems—a review. Meas Sci Technol 26:092003CrossRef Ferrucci M, Leach RK, Giusca C, Carmignato S, Dewulf W (2015) Towards geometrical calibration of x-ray computed tomography systems—a review. Meas Sci Technol 26:092003CrossRef
108.
go back to reference Flay N, Sun W, Brown S, Leach RK, Blumensat T (2015) Investigation of the focal spot drift in industrial cone-beam x-ray computed tomography. In: Proceedings of the DIR 2015, Ghent, Belgium, June 2015 Flay N, Sun W, Brown S, Leach RK, Blumensat T (2015) Investigation of the focal spot drift in industrial cone-beam x-ray computed tomography. In: Proceedings of the DIR 2015, Ghent, Belgium, June 2015
109.
go back to reference Brooks RA, Di Chiro G (1976) Beam hardening in x-ray reconstructive tomography. Phys Med Biol 21:390–398CrossRef Brooks RA, Di Chiro G (1976) Beam hardening in x-ray reconstructive tomography. Phys Med Biol 21:390–398CrossRef
110.
go back to reference Santiago P, Gage HD (1995) Statistical-models of partial volume effect. IEEE Trans Image Processing 4:1531–1540CrossRef Santiago P, Gage HD (1995) Statistical-models of partial volume effect. IEEE Trans Image Processing 4:1531–1540CrossRef
111.
go back to reference Schorner K, Goldammer M, Stephan J (2011) Comparison between beam-stop and beam-hole array scatter correction techniques for industrial X-ray cone-beam CT. Nucl Instrum Meth B 269:292–299CrossRef Schorner K, Goldammer M, Stephan J (2011) Comparison between beam-stop and beam-hole array scatter correction techniques for industrial X-ray cone-beam CT. Nucl Instrum Meth B 269:292–299CrossRef
112.
go back to reference Mail N, Moseley DJ, Siewerdsen JH, Jaffray DA (2008) An empirical method for lag correction in cone-beam CT. Med Phys 35:5187–5196CrossRef Mail N, Moseley DJ, Siewerdsen JH, Jaffray DA (2008) An empirical method for lag correction in cone-beam CT. Med Phys 35:5187–5196CrossRef
113.
go back to reference Carmignato S, Pierobon A, Savio E (2011) First international intercomparison of computed tomography systems for dimensional metrology. In: Proceedings of the 11th Euspen international conference, Como, Italy, May 2011. pp 84–87 Carmignato S, Pierobon A, Savio E (2011) First international intercomparison of computed tomography systems for dimensional metrology. In: Proceedings of the 11th Euspen international conference, Como, Italy, May 2011. pp 84–87
114.
go back to reference Dewulf W, Kiekens K, Tan Y, Welkenhuyzen F, Kruth J-P (2013) Uncertainty determination and quantification for dimensional measurements with industrial computed tomography. Ann CIRP 62:535–538CrossRef Dewulf W, Kiekens K, Tan Y, Welkenhuyzen F, Kruth J-P (2013) Uncertainty determination and quantification for dimensional measurements with industrial computed tomography. Ann CIRP 62:535–538CrossRef
115.
go back to reference Hiller J, Maisl M, Reindl LM (2012) Physical characterization and performance evaluation of an X-ray micro-computed tomography system for dimensional metrology applications. Measur Sci Technol 23:085404CrossRef Hiller J, Maisl M, Reindl LM (2012) Physical characterization and performance evaluation of an X-ray micro-computed tomography system for dimensional metrology applications. Measur Sci Technol 23:085404CrossRef
116.
go back to reference Hsieh J, Chao E, Thibault J, Grekowicz B, Horst A, McOlash S, Myers TJ (2004) A novel reconstruction algorithm to extend the CT scan field-of-view. Med Phys 31:2385–2391CrossRef Hsieh J, Chao E, Thibault J, Grekowicz B, Horst A, McOlash S, Myers TJ (2004) A novel reconstruction algorithm to extend the CT scan field-of-view. Med Phys 31:2385–2391CrossRef
117.
go back to reference Krämer P, Weckenmann A (2010) Multi-energy image stack fusion in computed tomography. Measur Sci Technol 21:045105CrossRef Krämer P, Weckenmann A (2010) Multi-energy image stack fusion in computed tomography. Measur Sci Technol 21:045105CrossRef
118.
119.
go back to reference Flay N, Leach RK (2012) Application of the optical transfer function in x-ray computed tomography—a review. NPL Report ENG 41 Flay N, Leach RK (2012) Application of the optical transfer function in x-ray computed tomography—a review. NPL Report ENG 41
120.
go back to reference Landis EN, Keane DT (2010) X-ray microtomography. Mater Charact 61:1305–1316CrossRef Landis EN, Keane DT (2010) X-ray microtomography. Mater Charact 61:1305–1316CrossRef
Metadata
Title
Micro-scale Geometry Measurement
Authors
Samanta Piano
Rong Su
Richard Leach
Copyright Year
2017
DOI
https://doi.org/10.1007/978-3-319-39651-4_8

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