Micro Structured, Multipurpose Hydrogen Alarm Sensor System on Semiconductor Basis

A semiconductor-based Hydrogen sensor is going to be modified at different processing stages to meet practical demands for reliable and broad applications. Optimizations aiming to reduce cross sensitivity and enhance stability for implementation in security structures of growing hydrogen system being established due to the industrial translation for better sustainability and reduction of CO₂ emission. Objective is combining sensor elements, modifying sensor characteristics for improved workflow and more economical use of resources in process chains. The specific bulk material consisting of Si/SiO2/Si₃N₄ covered with LaF₃ is modified for improved sensor characteristics and broad sensor application fields. Different gate structures which form the sensitive area are deposited via PVD. The system is valid for a fast detection of Hydrogen in air to prevent risks of combustion or explosion and also has potential for healthcare applications due to its high sensitivity.