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Published in:
2013 | OriginalPaper | Chapter
6. Microanalysis with HIM
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Abstract
For many users, the most important application of an SEM is its ability to identify the chemical composition of a specimen. Energy dispersive spectroscopy (EDS) of the X-rays fluoresced from samples of interest by the incident electron beam provides chemical microanalysis combining unparalleled sensitivity together with high spatial resolution for elements across the entire periodic table. This technique would therefore also be the automatic first choice for microanalysis when using ion beams if it were a viable option.