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Microsystem Technologies

Issue 12/2016

Content (25 Articles)

Technical Paper

Fabrication and packaging of MEMS based platform for hydrogen sensor using ZnO–SnO2 composites

Biplob Mondal, Santanu Maity, Sonali Das, Dipankar Panda, Hiranmay Saha, Avra Kundu

Technical Paper

Numerical model of a nanoelectric line from a graphene component

P. Fiala, D. Nešpor, P. Drexler, M. Steinbauer

Technical Paper

Periodic material structures tested by the noise spectroscopy method

P. Drexler, J. Seginak, J. Mikulka, D. Nešpor, Z. Szabó, P. Marcoň, P. Fiala

Technical Paper

Design and fabrication of differently shaped pyramids on Si{100} by anisotropic wet etching

Kodai Imaeda, Katsuhiko Bessho, Mitsuhiro Shikida

Technical Paper

Impact of thermal contact resistances on micro-gap heat losses for microthermionic power generators

Remi Yacine Belbachir, Zhonglie An, Takahito Ono

Technical Paper

Design and simulations of a new biaxial silicon resonant micro-accelerometer

Lei Zhao, Bo Dai, Bo Yang, Xiaojun Liu

Technical Paper

Glass capillaries based on a glass reflow into nano-trench for controlling light transmission

Nguyen Van Toan, Suguru Sangu, Naoki Inomata, Takahito Ono

Technical Paper

Simulation of temperature around laser-heating media in heat-assisted magnetic recording

Guoqing Zhang, Hui Li, Shengnan Shen, Jin Lei, Hao Zheng, Shijing Wu

Technical Paper

Electric conduction failure of ACF packages based on pad array aspect ratio consideration

Chao-Ming Lin, Tzu-Chao Lin, Yen-Chun Liu

Technical Paper

Structural, optical and electrical properties of Cu2Zn1−xCdxSnS4 quinternary alloys nanostructures deposited on porous silicon

A. S. Ibraheam, Y. Al-Douri, J. M. S. Al-Fhdawi, Hamid S. AL-Jumaili, K. D. Verma, U. Hashim, R. M. Ayub, A. Rahim Ruslinda, M. K. Md Arshad, A. H. Reshak, S. B. Abd Hamid

Technical Paper

Numerical analysis of non Newtonian fluid flow in a low voltage cascade electroosmotic micropump

Reza Kamali, Mohammad Karim Dehghan Manshadi, Amin Mansoorifar

Technical Paper

Post micromachining of MPW based CMOS–MEMS comb resonator and its mechanical and thermal characterization

John Ojur Dennis, Farooq Ahmad, M. Haris Bin Md Khir, Nor Hisham Bin Hamid

Technical Paper

Design and modeling of a novel RF MEMS series switch with low actuation voltage

Khadeijeh Khodadady, Bahram Azizolla Ganji

Technical Paper

Vacuum chucking assist sheet for fixing flexible sheets during the printing process

Ken-ichi Nomura, Hirobumi Ushijima, Kengo Noguchi, Noriko Miyaguchi, Takeshi Kobayashi, Masaaki Kawabe

Technical Paper

Design and performance analysis of capacitive micromachined ultrasonic transducer (CMUT) array for underwater imaging

Rui Zhang, Chenyang Xue, Changde He, Yongmei Zhang, Jinlong Song, Wendong Zhang

Technical Paper

Deformation characteristics of MEMS microspring under static and shock loads

Hua Li, Chaoqun Guo, Yukai Li, Yaobin Chen, Jiancheng Liu, Zhencheng Chen

Technical Paper

Improving the dynamic performance of capacitive micro-accelerometer through electrical damping

Wu Zhou, Huijun Yu, Jian Zeng, Bei Peng, Zhi Zeng, Xiaoping He, Yang Liu

Technical Paper

Nonlinear effect of disk resonator

Wei Luo, Jicong Zhao, Quan Yuan, Bohua Peng, Jinling Yang, Fuhua Yang