Issue 3/2012
Content (17 Articles)
Temperature compensation of micromachined silicon hot wire sensor using ANN technique
M. Laghrouche, B. Idjeri, K. Hammouche, M. Tahanout, J. Boussey, S. Ameur
Mechanical and tribological characterization of a thermally actuated MEMS cantilever
Marius Pustan, Véronique Rochus, Jean-Claude Golinval
Hot embossing at viscous state to enhance filling process for complex polymer structures
Xuelin Zhu, Terrence W. Simon, Tianhong Cui
Flexible balloon actuators for active flow control
Haifeng Lv, Chengyu Jiang, Hui Hou, Zhou Zhou, Jinjun Deng, Binghe Ma, Weizheng Yuan
Determination of residual stress in deep submicron thick films by the critical buckling technique of annular thin plates
Da-Yong Qiao, Xiao-Pei Zheng
Design and characterization of an integrated multifunction micro sensor
Yulong Zhao, Weizhong Wang, Bian Tian, Libo Zhao, Zhuangde Jiang
Design and fabrication of a resonant scanning micromirror suspended by V shaped beams with vertical electrostatic comb drives
Xiao-Ying Li, Qian Jin, Da-Yong Qiao, Bao-Peng Kang, Bin Yan, Yao-Bo Liu
Flip chip solder bump inspection using vibration analysis
Junchao Liu, Tielin Shi, Qi Xia, Guanglan Liao
Disposable microfluidic chip for rapid pathogen identification with DNA microarrays
Johannes R. Peham, Lisa-Maria Recnik, Walter Grienauer, Michael J. Vellekoop, Christa Nöhammer, Herbert Wiesinger-Mayr
A three-axis SOI accelerometer sensing with both in-plane and vertical comb electrodes
Jin Xie, Rahul Agarwal, Youhe Liu, Julius Minglin Tsai
Fabrication of a guide block for measuring a device with fine pitch area-arrayed solder bumps
Woo-Chang Choi, Jee-Youl Ryu
Microelectronic chip cooling: an experimental assessment of a liquid-passing heat sink, a microchannel heat rejection module, and a microchannel-based recirculating-liquid cooling system
Bin Lu, W. J. Meng, Fanghua Mei
Improved process flow for buried channel fabrication in silicon
Z. Fekete, A. Pongrácz, P. Fürjes, G. Battistig
Modelling and evaluation of a thermal microfluidic sensor fabricated on plastic substrate
G. P. Patsis, A. Petropoulos, G. Kaltsas
Embedding conductive patterns of elastomer nanocomposite with the assist of laser ablation
Chao-Xuan Liu, Jin-Woo Choi
Fabrication of polystyrene microfluidic devices using a pulsed CO2 laser system
Huawei Li, Yiqiang Fan, Rimantas Kodzius, Ian G. Foulds