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Microsystem Technologies

Issue 3/2020

Content (35 Articles)

Technical Paper

Characterization of SOI technology based MEMS differential capacitive accelerometer and its estimation of resolution by near vertical tilt angle measurements

Yashoda Parmar, Nidhi Gupta, Vinita Gond, S. S. Lamba, Siva Rama Krishna Vanjari, Shankar Dutta, K. K. Jain, D. K. Bhattacharya

Technical Paper

Large-amplitude parametric response of fluid-conveying nanotubes due to flow pulsations

Ali Farajpour, Mergen H. Ghayesh, Hamed Farokhi

Technical Paper

Design and application of a hybrid alignment platform for a double-sided hot embossing process

Cheng-Hsien Wu, Cheng-Hao Chiu, Yu-Hsuan Chen

Technical Paper

Fabrication of coplanar microheater platform for LPG sensing applications

Shobi Bagga, Jamil Akhtar, Sanjeev Mishra, Preeti

Technical Paper

Effect of complex turbulator on heat transfer of nanomaterial considering turbulent flow

Lian Chen, M. Jafaryar, Ahmad Shafee, Rebwar Nasir Dara, Iskander Tlili, Zhixiong Li

Technical Paper

Dielectrophoresis-based microfluidic platform to sort micro-particles in continuous flow

Mohsen Hajari, Amirali Ebadi, Mohammad Javad Farshchi Heydari, Morteza Fathipour, Madjid Soltani

Technical Paper

Fabrication method with high-density, high-height microneedle using microindentation method for drug delivery system

Yoshihiro Hasegawa, Yuka Yasuda, Kazuhiro Taniguchi, Mitsuhiro Shikida

Technical Paper

Development of a high throughput micro-heater array with controllable temperature for each heating unit

Yiwei Bai, Jiaojiao Tian, Zude Lin, Minmin You, Jingquan Liu, Xiaolin Wang

Technical Paper

Shape memory alloy based controllable multi-port microvalve

Christof Megnin, Bahman Moradi, Jannik Zuern, Hinnerk Ossmer, Marcel Gueltig, Manfred Kohl

Technical Paper

Fast response and recovery of nano-porous silicon based gas sensor

V. S. Selvakumar, L. Sujatha

Technical Paper

A new hybrid robust control of MEMS gyroscope

Mehran Rahmani, Mohammad Habibur Rahman, Michael Nosonovsky

Technical Paper

Fabrication of SU-8 photoresist micro–nanofluidic chips by thermal imprinting and thermal bonding

Lei Sun, Lingpeng Liu, Liping Qi, Ran Guo, Kehong Li, Zhifu Yin, Dongjiang Wu, Jiangang Zhou, Helin Zou

Technical Paper

Meat and fish freshness evaluation by functionalized cantilever-based biosensors

Carlos André Bravo Costa, Dionis Grazhdan, Jacek Fiutowski, Eric Nebling, Lars Blohm, Fabian Lofink, Horst-Günter Rubahn, Roana de Oliveira Hansen

Open Access Technical Paper

Design process and simulation testing of a shape memory alloy actuated robotic microgripper

H. Llewellyn-Evans, C. A. Griffiths, A. A. Fahmy

Technical Paper

High-selectivity adjustable dual-band bandpass filter using a quantic-mode resonator

Kai Li, Guo-qin Kang, Han Liu, Zhi-yuan Zhao

Technical Paper

A parasitic type piezoelectric actuator with an asymmetrical flexure hinge mechanism

Nen Wan, Jianming Wen, Yili Hu, Junwu Kan, Jianping Li

Technical Paper

Dusty flow with different water based nanoparticles along a paraboloid revolution: thermal analysis

M. Gnaneswara Reddy, Asiful H. Seikh, M. V. V. N. L. Sudharani, Mohammad Rahimi-Gorji, Nabeel Alharthi

Technical Paper

Hot embossing of microstructure with moving induction heating and gas-assisted pressuring

Ching-Chieh Kao, Kun-Cheng Ke, Wei-Cheng Hung, Sen-Yeu Yang

Technical Paper

Plane wave propagation in a piezo-thermoelastic rotating medium within the dual-phase-lag model

Ethar A. A. Ahmed, M. S. Abou-Dina, A. F. Ghaleb

Technical Paper

A design method for low-frequency rotational piezoelectric energy harvesting in micro applications

Xiaobo Rui, Zhoumo Zeng, Yu Zhang, Yibo Li, Hao Feng, Zi Yang

Technical Paper

Implementation of four-port MIMO diversity microstrip antenna with suppressed mutual coupling and cross-polarized radiations

Sandeep Sharma, Mainuddin, Binod Kumar Kanaujia, Mukesh Kumar Khandelwal

Technical Paper

Kinematic modelling and emulation of robot for traversing over the pipeline in the refinery

Devesh Mishra, Ram Suchit Yadav, Krishna Kant Agrawal

Open Access Technical Paper

A study on harvesting of PKL electricity

Lovelu Hassan, K. A. Khan

Technical Paper

Development and optimization of the laser-assisted bonding process for a flip chip package

Young Moon Jang, Youngil Kim, Sung-Hoon Choa