Issue 3-4/2007
HARMST, High Aspect Ratio Micro Structure Technology Workshop, Gyenogju, Korea, 10-13 Jnue 2005 (This is the first of two issues)
Content (32 Articles)
HARMST, High Aspect Ratio Micro Structure Technology Workshop, Gyenogju, Korea, 10–13 June 2005
Tai Hun Kwon, Bernd Michel
Geometrical strengthening and tip-sharpening of a microneedle array fabricated by X-ray lithography
Sommawan Khumpuang, Mitsuhiro Horade, Kazuya Fujioka, Susumu Sugiyama
Mask design compensation for sloped sidewall structures fabricated by X-ray lithography
Mitsuhiro Horade, Sommawan Khumpuang, Kazuya Fujioka, Susumu Sugiyama
Fabrication of high aspect ratio nano gratings using SR lithography
Fumiki Kato, Shinya Fujinawa, Yigui Li, Susumu Sugiyama
Fabrication of microgratings on PMMA plate and curved surface by using copper mesh as X-ray lithography mask
Yigui Li, Susumu Sugiyama
High aspect ratio tapered hollow metallic microneedle arrays with microfluidic interconnector
Kabseog Kim, Jeong-Bong Lee
High aspect ratio air core solenoid inductors using an improved UV-LIGA process with contrast enhancement material
Hong Lu, Brandon Pillans, Jong-Chang Lee, Jeong-Bong Lee
SU-8 3D microoptic components fabricated by inclined UV lithography in water
Z. Ling, K. Lian
In situ fabrication of SU-8 movable parts by using PAG-diluted SU-8 as the sacrificial layer
Z. Ling, K. Lian
Processing-microstructure-resulting materials properties of LIGA Ni
K. Lian, J. C. Jiang, Z. G. Ling
Design and fabrication of a SU-8 based electrostatic microactuator
Wen Dai, Kun Lian, Wanjun Wang
Design and UV-LIGA microfabrication of an electro-statically actuated power relay
S. J. Jeong, W. Wang
Fabrication of a polymeric tapered HARMs array utilizing a low-cost nickel electroplated mold insert
In-Hyouk Song, Yoonyoung Jin, Pratul K. Ajmera
Different methods for the fabrication of UV-LIGA molds using SU-8 with tapered de-molding angles
C. Fu, H. Huang
Effect of seed layer stress on the fabrication of monolithic MEMS microstructure
C. K. Chung, Y. J. Fang, C. M. Cheng, Y. Z. Hong, C. H. Wang
Micro-specific design flow for tool-based microtechnologies
Albert Albers, Norbert Burkardt, Tobias Deigendesch, Jochen Marz
SU-8: promising resist for advanced direct LIGA applications for high aspect ratio mechanical microparts
J. Kouba, R. Engelke, M. Bednarzik, G. Ahrens, Heinz-Ulrich Scheunemann, G. Gruetzner, B. Loechel, H. Miller, D. Haase
Investigations on possibilities of inline inspection of high aspect ratio microstructures
Rainer Engelke, Gisela Ahrens, Norbert Arndt-Staufenbiehl, Stefan Kopetz, Karin Wiesauer, Bernd Löchel, Henning Schröder, Johann Kastner, Andreas Neyer, David Stifter, Gabi Grützner
Direct LIGA service for prototyping: status report
B. Loechel, J. Goettert, Y. M. Desta
A new removable resist for high aspect ratio applications
Matthias Schirmer, Doris Perseke, Eva Zena, Daniel Schondelmaier, Ivo Rudolph, Bernd Loechel
Microlens fabrication using an etched glass master
P. Zhang, G. Londe, J. Sung, E. Johnson, M. Lee, H. J. Cho
Fabrication of RF MEMS variable capacitors by deep X-ray lithography and electroplating
Sven Achenbach, David Klymyshyn, Darcy Haluzan, Timo Mappes, Garth Wells, Jürgen Mohr
Structure quality in deep X-ray lithography applying commercial polyimide-based masks
Sven Achenbach, Martin Boerner, Seichin Kinuta, Walter Bacher, Juergen Mohr, Volker Saile, Yasunori Saotome
Process conditions in X-ray lithography for the fabrication of devices with sub-micron feature sizes
Timo Mappes, Sven Achenbach, Juergen Mohr
Fabrication of micro-gas chromatograph columns for fast chromatography
Abhinav Bhushan, Dawit Yemane, Dan Trudell, Edward B. Overton, Jost Goettert
A hybrid approach for fabrication of polymeric BIOMEMS devices
Varshni Singh, Yohannes Desta, Proyag Datta, Jason Guy, Mark Clarke, Daniel L. Feedback, J. Weimert, Jost Goettert
Large area micro hot embossing of Pyrex glass with GC mold machined by dicing
Masaharu Takahashi, Yoichi Murakoshi, Ryutaro Maeda, Kohei Hasegawa
Development of precision transfer technology of atmospheric hot embossing by ultrasonic vibration
Harutaka Mekaru, Osamu Nakamura, Osamu Maruyama, Ryutaro Maeda, Tadashi Hattori
Fabrication of a spiral microcoil using a 3D-LIGA process
Harutaka Mekaru, Shinji Kusumi, Noriaki Sato, Masami Shimizu, Michiru Yamashita, Osamu Shimada, Tadashi Hattori
High aspect ratio air core solenoid inductors using an improved UV-LIGA process with contrast enhancement material
Hong Lu, Brandon Pillans, Jong-Chan Lee, Kyunghwan Kim, Jeong-Bong Lee