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Microsystem Technologies

Issue 4/2020

Content (36 Articles)

Technical Paper

Contact stress and bending stress calculation model of spur face gear drive based on orthogonal test

Min Jin, Md Rasedul Islam, Liu Li, Mohammad Habibur Rahman

Technical Paper

Laser-assisted surface processing for functionalization of polymers on micro- and nano-scale

Jan-Hendric Rakebrandt, Yijing Zheng, Heino Besser, Tim Scharnweber, Hans Jürgen Seifert, Wilhelm Pfleging

Technical Paper

A 45° tilted 3D-printed scanner for compact side-view laser scanning endoscopy

Janset Savaş, Melisa Altınsoy, Yiğit Dağhan Gökdel, Onur Ferhanoğlu, Fehmi Çivitci

Technical Paper

Evaluation of porous polydimethylsiloxane/carbon nanotubes (PDMS/CNTs) nanocomposites as piezoresistive sensor materials

Taissa R. Michel, Michael J. Capasso, Muhammet E. Cavusoglu, Jeremy Decker, Danilo Zeppilli, Cheng Zhu, Smitesh Bakrania, Jennifer A. Kadlowec, Wei Xue

Technical Paper

The design of high strength electro-thermal micro-actuator based on the genetic algorithm

Jui-Ching Hsieh, David T. W. Lin, Min-Sheng Suen

Technical Paper

Efficient co-design partitioning of WLANs on SoC-based SDRs

Rami Akeela, Yacoub Elziq

Technical Paper

Fabrication of refractive silicon microlens array with a large focal number and accurate lens profile

Xiaojun Zhou, Aiguo Song, Shuai Wang, Mengjia Wang, Weixing Yu

Technical Paper

Controlled gradual and local thinning of free-standing nanometer thick Si3N4 films using reactive ion etch

Fatma Dogan Guzel, William H. Pitchford, Jaspreet Kaur

Technical Paper

Capacitive sensor for vehicle obstacle detection, especially for pedestrian detection

Yuting Liu, Jiahao Deng, Yong Ye, Chao Han, Zhuo Hou, Zuodong Duan

Technical Paper

Nanoparticle transportation with insertion of external device to augment the intensity

M. Jafaryar, Ahmad Shafee, Rebwar Nasir Dara, Amin Firouzi, Houman Babazadeh, Z. Li

Technical Paper

Effect of squeeze air film damping on diffraction grating based bio-inspired MEMS directional microphone

Sangil Han, Asif Ishfaque, Paul Phamduy, Byungki Kim

Technical Paper

Transmission characteristics of a two-dimensional flexure hinge mechanism

Caofeng Yu, Meijun Xiong, Lufei Cui, Lei Dai

Technical Paper

Effects of coupling in piezoelectric multi-beam structure

Ashutosh Anand, Sourav Naval, Prasun Kumar Sinha, Nikhil Kumar Das, Sudip Kundu

Technical Paper

Development and optimization of RF MEMS switch

Yasser Mafinejad, Hamid Reza Ansari, Saeed Khosroabadi

Technical Paper

Flexible nozzle based liquid metal direct writing system assisted in patterned silicon nanowires

Zhichao Pei, Weibin Rong, Lefeng Wang, Shiyu Zhang, Xiangjin Zhao, Tao Zou, Lining Sun

Technical Paper

Three-dimensional micromachined diamond birdbath shell resonator on silicon substrate

Zhaoyang Liu, Weiping Zhang, Feng Cui, Jian Tang

Technical Paper

Injection molding and characterization of PMMA-based microfluidic devices

Xiuqing Ma, Rui Li, Zhiming Jin, Yiqiang Fan, Xuance Zhou, Yajun Zhang

Technical Paper

Design of resistive random access memory cell and its architecture

Shashank Kumar Dubey, Aminul Islam

Technical Paper

Local electroplating deposition for free-standing micropillars using a bias-modulated scanning ion conductance microscope

Kenta Nakazawa, Masayoshi Yoshioka, Yusuke Mizutani, Tatsuo Ushiki, Futoshi Iwata

Technical Paper

Investigating the impact of thermal annealing on the photovoltaic performance of chemical bath deposited SnO2/p-Si heterojunction solar cells

Anannya Bhattacharya, Jenifar Sultana, Subhrajit Sikdar, Rajib Saha, Sanatan Chattopadhyay

Technical Paper

Multilayer triple band bandpass filter with a floating U-shaped SIR and split ring resonator

Somdotta Roy Choudhury, Mukesh Kumar, Aditi Sengupta, Susanta Kumar Partui, Santanu Das

Technical Paper

Residual stress compensated silicon nitride microcantilever array with integrated poly-Si piezoresistor for gas sensing applications

Manoj Kandpal, Satya Narayan Behera, Jaspreet Singh, Vijay Palaparthy, Surinder Singh

Technical Paper

Characterization of MEMS comb capacitor

Farooq Ahmad, Athar Baig, John Ojur Dennis, Nor Hisham Bin Hamid, M. Haris Bin Md Khir