Issue 4-5/2008
Special issue: Conference Smart Sensors, Actuators and MEMS, Maspalomas, Gran Canaria, Spain, 2-4 May 2007
Content (33 Articles)
Special Issue of the Conference Smart Sensors, Actuators and MEMS, Maspalomas, Gran Canaria, Spain, 2–4 May 2007
B. Michel, T. Becker, U. Schmid
Silicon cantilever sensor for micro-/nanoscale dimension and force metrology
Erwin Peiner, Lutz Doering, Michael Balke, Andreas Christ
VHDL Implementation of a communication interface for integrated MEMS
E. Magdaleno Castelló, M. Rodríguez Valido, A. J. Ayala Alfonso
Development of automated microrobot-based nanohandling stations for nanocharacterization
Sergej Fatikow, Volkmar Eichhorn, Florian Krohs, Iulian Mircea, Christian Stolle, Saskia Hagemann
Novel sensor design methodology for measurements of the complex solar wind–magnetospheric–ionospheric system
G. Dekoulis, F. Honary
Characterization of aluminium nitride and aluminium oxide thin films sputter-deposited on organic substrates
U. Schmid, A. Ababneh, H. Seidel, R. Wagner, K. Bauer
Bismuth film electrodes for heavy metals determination
Vlastimil Rehacek, Ivan Hotovy, Marian Vojs, Fedor Mika
Mixed metal oxide films as pH sensing materials
Edric Gill, Khalil Arshak, Arousian Arshak, Olga Korostynska
Wafer-level plasma activated bonding: new technology for MEMS fabrication
Viorel Dragoi, Gerald Mittendorfer, Christine Thanner, Paul Lindner
Optimizing the performance of a Coriolis-based angular rate sensor applying an analytical approach
A. Kulygin, M. Gergen, U. Schmid, H. Seidel
Investigation of fabrication and encapsulation processes for a flexible tag microlab
E. Abad, B. Mazzolai, A. Juarros, D. Gómez, A. Mondini, I. Sayhan, A. Krenkow, Th. Becker
Fabrication and characterization of a passive silicon-based direct methanol fuel cell
J. P. Esquivel, N. Sabaté, J. Santander, N. Torres, C. Cané
A new micromachined sensor system for tactile measurements of high aspect ratio microstructures
M. Balke, E. Peiner, L. Doering
A liquid chromatography miniaturised system for agrofood applications
Antonella Benvenuto, Leandro Lorenzelli, Cristian Collini, Vittorio Guarnieri, Andrea Adami, Elisa Morganti
Ozone and gamma radiation sensing properties of In2O3:ZnO:SnO2 thin films
O. Korostynska, K. Arshak, G. Hickey, E. Forde
Etching behaviour of sputter-deposited aluminium nitride thin films in H3PO4 and KOH solutions
A. Ababneh, H. Kreher, U. Schmid
Design and consideration of wafer level micropackaging for distributed RF MEMS phase shifters
Xun-jun He, Qun Wu, Bo-shi Jin, Kai Tang, Ming-xin Song, Jing-hua Yin, Hui-cheng Zhu
Ultra-low-power components for an RFID Tag with physical and chemical sensors
Stefano Zampolli, Ivan Elmi, Enrico Cozzani, Gian Carlo Cardinali, Andrea Scorzoni, Michele Cicioni, Santiago Marco, Francisco Palacio, Jose M. Gómez-Cama, Ilker Sayhan, Thomas Becker
A labchip for highly selective and sensitive electrochemiluminescence detection of Hg2+ ions in aqueous solution employing integrated amorphous thin film diodes
Heiko Schäfer, Hengwei Lin, Michael Schmittel, Markus Böhm
Germanium resistors for RF MEMS based microsystems
K. Grenier, C. Bordas, S. Pinaud, L. Salvagnac, D. Dubuc
Measurement of the pressure broadening coefficients of the oxygen A-band using a low cost, polarization stabilized, widely tunable vertical-cavity surface-emitting laser
Benjamin Scherer, Jürgen Wöllenstein, Matthias Weidemüller, Wenzel Salzmann, Johannes Michael Ostermann, Fernando Rinaldi, Rainer Michalzik
Coupling coefficient determination based on simulation and experiment for ST-Cut quartz saw delay-line response
Yi-Chu Hsu, Ngoc-Bich Le
Compensation methods for a silicon tuning fork gyroscope
Eik Arnold, Franz Nuscheler
Gallium arsenide suspended microheater for MEMS sensor arrays
I. Hotovy, V. Rehacek, F. Mika, T. Lalinsky, S. Hascik, G. Vanko, M. Drzik
A compact optical multichannel system for ethylene monitoring
J. Hildenbrand, J. Wöllenstein, S. Hartwig, A. Eberhardt, B. Halford, M. Moreno, J. Fonollosa, L. Fonseca, J. Santander, R. Rubio, I. Gràcia, C. Cané
Nano- and microsized metal oxide thin film gas sensors
Stefan Palzer, Emmanuel Moretton, Francisco Hernandez Ramirez, Albert Romano-Rodriguez, Jürgen Wöllenstein
Design and implementation of mechanical resonators for optimized inertial electromagnetic microgenerators
Christophe Serre, Alejandro Pérez-Rodríguez, Nuria Fondevilla, Emile Martincic, Susanna Martínez, Joan Ramon Morante, Josep Montserrat, Jaume Esteve
Dye and polymer based light sensor for tag integration
Ilker Sayhan, Marie-Luise Bauersfeld, Juergen Woellenstein, Thomas Becker
Three-dimensional simulation of sacrificial etching
Johann Cervenka, Hajdin Ceric, Siegfried Selberherr
RNA amplification chip with parallel microchannels and droplet positioning using capillary valves
Liv Furuberg, Michal Mielnik, Anja Gulliksen, Lars Solli, Ib-Rune Johansen, Jörg Voitel, Tobias Baier, Lutz Riegger, Frank Karlsen
Fabrication and characterization of a monolithic piezoelectric actuator for fiber coupling
C. Bruchmann, B. Höfer, P. Schreiber, R. Eberhardt, W. Buss, T. Peschel, S. Gebhardt, A. Tünnermann, E. Beckert
PNIPAM: a thermo-activated nano-material for use in optical devices
Solon Mias, Jan Sudor, Henri Camon
Micro actuators on the basis of thin SMA foils
M. Leester-Schädel, B. Hoxhold, C. Lesche, S. Demming, S. Büttgenbach