Issue 5/2012
Content (16 Articles)
Fabrication of PZT nano dot array and their ferroelectric properties
Gaoyang Zhao, Zhezhe Wang, Guomin Xu, Xiaocui Deng
A novel DMTL capacitive switch with electrostatic actuation MAM capacitors
Cheng Deng, Jingfu Bao, Yijia Du, Xinghai Zhao
A passive mechanism for thermal stress regulation in micro-machined beam-type structures
Pezhman A. Hassanpour, Patricia M. Nieva, Amir Khajepour
Robust regulation and tracking system design for multivariable control of the tape transport mechanism
Hamed Moradi, Firooz Bakhtiari-Nejad, Aria Alasty
Multi-dofs MEMS displacement sensors based on the Stewart platform theory
Andrea Mura
Manufacturing and replication of glass pyramidal micro-structures by using the injection moulding process
M. Sahli, C. Millot, J.-C Gelin, T. Barrière
Piezoresistive polypropylene–carbon nanofiber composites as mechanical transducers
A. J. Paleo, F. W. J. van Hattum, J. G. Rocha, S. Lanceros-Méndez
Measurement of contact potential difference in head disk interface by readback signal spectrum
Mingsheng Zhang, Bo Liu
Polyimide/tetraethoxysilane-based hybrid polyfilms for microelectronics application
S. K. Kurmvanshi, P. R. Patel, A. K. Patel, R. Bajpai, J. M. Keller
A miniaturized bulk micromachined triaxial accelerometer fabricated using deep reactive etching through a multilevel thickness membrane
Luca Petricca, Christopher Grinde, Per Ohlckers
Fabrication of polymer micro-tip by optical lensing technique
Pradip Kumar Dey, Soumen Das, Pranabendu Ganguly
Fabrication and measurements of dynamic response of an SOI based non-planar CMUT array
Tugrul Zure, Sazzadur Chowdhury
Study of dynamic characteristics of resonators for MEMS resonant vibratory gyroscopes
Li Yan, Fan Shangchun, Guo Zhanshe, Li Jing, Cao Le
Investigation of wax and paper materials for the fabrication of paper-based microfluidic devices
Z. W. Zhong, Z. P. Wang, G. X. D. Huang
Static characterization of microstructures using AOMSI and temporal phase-shifting (TPS) methods
Davoud Jahani, Sivakumar Narayanswamy, Muthukumaran Packirisamy, Murali Manohohar Pai
Low temperature deposited titanium boride thin films and their application to surface engineering of microscale mold inserts
Yang Mu, Ke Chen, W. J. Meng, Fanghua Mei