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Microsystem Technologies

Issue 6/2010

Content (16 Articles)

Technical Paper

A low voltage vertical comb RF MEMS switch

Samira Aghaei, Ebrahim Abbaspour-Sani

Technical Paper

Effect of nitrogen doping on piezoresistive properties of a-Si x C y thin film strain gauges

M. A. Fraga, H. Furlan, M. Massi, I. C. Oliveira

Technical Paper

Modeling of micro/nano particle separation in microchannels with field-flow fractionation

Minghao Song, Hongwei Sun, Majid Charmchi, Pengtao Wang, Zongqin Zhang, Mohammad Faghri

Technical Paper

Single-walled carbon nanotube network/poly composite thin film for flow sensor

Hui Cao, Zhiyin Gan, Qiang Lv, Han Yan, Xiaobin Luo, Xiaohui Song, Sheng Liu

Technical Paper

MEMS_DSC: a new device for microcalorimetric analysis in the biological field

S. Maggiolino, N. Scuor, R. L. Mahajan, O. Sbaizero

Technical Paper

Axial and shear fracture strength evaluation of silicon microneedles

Puneet Khanna, Kevin Luongo, Joel A. Strom, Shekhar Bhansali

Technical Paper

Dynamic actuation and sensing micro-device for mechanical response of cultured adhesive cells

Ken-ichi Konno, Tadashi Kosawada, Masato Suzuki, Takeshi Nakamura, Zhonggang Feng, Yasukazu Hozumi, Kaoru Goto

Technical Paper

Fabrication of a surface stress-based PDMS micro-membrane biosensor

Shengbo Sang, Hartmut Witte

Technical Paper

Effect of physical vapor deposition metallic thin films on micro injection molded weld line mechanical properties

Lei Xie, Monika Leester-Schädel, Gerhard Ziegmann, Stephanus Büttgenbach

Technical Paper

Monolithic micro-fabrication of Si micro-electro-mechanical structure with GaN light emitting diode

R. Ito, M. Wakui, H. Sameshima, F.-R. Hu, K. Hane

Technical Paper

Optimization of thermal fly-height control slider geometry for Tbit/in2 recording

Antonis I. Vakis, Andreas A. Polycarpou