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Microsystem Technologies

Issue 6/2022

Special Issue on DTIP 2017 & DTIP 2018

Content (24 Articles)

Technical Paper

Soft mold NanoImprint Lithography: a versatile tool for sub-wavelength grating applications

S. Pelloquin, S. Augé, K. Sharshavina, J.-B. Doucet, A. Héliot, H. Camon, A. Monmayrant, O. Gauthier-Lafaye

Technical Paper

Relative humidity influence on adhesion effect in MEMS flexible structures

Corina Birleanu, Marius Pustan, Florina Rusu, Cristian Dudescu, Raluca Muller, Angela Baracu

Technical Paper

Self-identification algorithm for zeolite-based thermal capacity gas sensor

M. Pouliquen, M. Denoual, C. Jorel, C. Radu, D. Robbes, J. Grand, H. Awala, S. Mintova, M. Harnois, O. de Sagazan, S. Inoue, E. Lebrasseur, K. Yamada, Y. Okamoto, A. Mita-Tixier, Y. Mita

Technical Paper

Characteristics of Li-ion micro batteries fully batch fabricated by micro-fluidic MEMS packaging

Robert Hahn, Marc Ferch, Neil Amponsah Kyeremateng, Katrin Hoeppner, Krystan Marquardt, Giuseppe Antonio Elia

Technical Paper

A microfluidic sensor in coplanar waveguide configuration for localized micrometric liquid spectroscopy in microwaves regime

Giovanni Maria Sardi, Andrea Lucibello, Francesco Cursi, Emanuela Proietti, Romolo Marcelli

Technical Paper

Design optimization of a dynamically flat resonating micro-mirror for pico-projection applications

Russell Farrugia, Ivan Grech, Duncan Camilleri, Owen Casha, Joseph Micallef, Edward Gatt

Technical Paper

Micro-fabricated thermal flow-rate sensors: the substrate material impact on the device performance and power consumption

Ferdous Shaun, Elyes Nefzaoui, Frederic Marty, William Cesar, Tarik Bourouina

Technical Paper

Chemical sensor based on a novel capacitive microwave flexible transducer with polymer nanocomposite-carbon nanotube sensitive film

Prince Bahoumina, Hamida Hallil, Jean-Luc Lachaud, Dominique Rebière, Corinne Dejous, Aymen Abdelghani, Kamel Frigui, Stephane Bila, Dominique Baillargeat, Qing Zhang, Phillipe Coquet, Carlos Paragua, Emmanuelle Pichonat, Henri Happy

Technical Paper

Modeling and physical analysis of an out-of-plane capacitive MEMS transducer with dynamically coupled electrodes

Gabriele Bosetti, Johannes Manz, Alfons Dehé, Ulrich Krumbein, Gabriele Schrag

Technical Paper

Development of energy harvesting MEMS vibration device sensor with wideband response function in low-frequency domain

Lan Zhang, Ryohei Takei, Jian Lu, Natsumi Makimoto, Toshihiro Itoh, Takeshi Kobayashi

Technical Paper

System-level simulations of multi-sensor systems and data fusion algorithms

Josué Manuel Rivera Velázquez, Frédérick Mailly, Pascal Nouet

Open Access Technical Paper

Automated insertion of package dies onto wire and into a textile yarn sheath

Dorothy Anne Hardy, Ioannis Anastasopoulos, Mohamad-Nour Nashed, Carlos Oliveira, Theodore Hughes-Riley, Abiodun Komolafe, John Tudor, Russel Torah, Steve Beeby, Tilak Dias

Technical Paper

Essential design and fabrication considerations for the reliable performance of an electrothermal MEMS microgripper

Marija Cauchi, Ivan Grech, Bertram Mallia, Pierluigi Mollicone, Barnaby Portelli, Nicholas Sammut

Technical Paper

Air damping of high performance resonating micro-mirrors with angular vertical comb-drive actuators

Russell Farrugia, Barnaby Portelli, Ivan Grech, Duncan Camilleri, Owen Casha, Joseph Micallef, Edward Gatt

Open Access Technical Paper

Modified PDMS packaging of sensory e-textile circuit microsystems for improved robustness with washing

Olivia Ojuroye, Russel Torah, Steve Beeby

Technical Paper

High Q 2D-length extension mode resonators for potential time–frequency applications

Paul Chapellier, Pierre Lavenus, Olivier Le Traon, Bernard Dulmet

Technical Paper

Synergistic photoluminescent interaction of Si and CdTe quantum dots

Janeth Alexandra Garcia-Monge, Clarissa D. Vazquez-Colon, Arturo Ponce, Gregory Guisbiers, Arturo A. Ayon

Technical Paper

Anomalous Stokes shift of colloidal quantum dots and their influence on solar cell performance

J. E. Pelayo-Ceja, A. Zazueta-Raynaud, R. Lopez-Delgado, M. E. Alvarez-Ramos, E. Saucedo-Flores, R. Ruelas-Lepe, F. Orona-Magallanes, R. Guerrero-Gonzalez, A. Ayon

Open Access Technical Paper

Finite element analysis (FEA) modelling and experimental verification to optimise flexible electronic packaging for e-textiles

Menglong Li, Russel Torah, Jingqi Liu, John Tudor, Steve Beeby

Technical Paper

Detection of TNT in sulfuric acid solution by SiNWs-FET based sensor

Hui Wang, Shixing Chen, Anran Gao, Yuelin Wang, Tie Li

Technical Paper

Characterization of liquid crystals impregnated micrometric diffraction gratings for an active near-IR light extraction control

A. Héliot, S. Pelloquin, O. Gauthier-Lafaye, A. Monmayrant, H. Camon, T. Gacoin, K. Lahlil, L. Martinelli, C. Biver, S. Archambeau