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Microsystem Technologies

Issue 7/2024

Content (10 Articles)

  • Review Paper

Review on data-driven approaches for improving the selectivity of MOX-sensors

Mohand Djeziri, Samir Benmoussa, Marc Bendahan, Jean-Luc Seguin

  • Review Paper

CMOS-MEMS electrostatic micromotor based on FGMOS transduction by electromechanical modification of its coupling coefficient and low operating voltage

L. Sánchez–Márquez, G. S. Abarca–Jiménez, M. A. Reyes–Barranca, J. Mares-Carreño

  • Review Paper

VOCs sensors based on bulk acoustic resonators: a comprehensive review

Arun Kishor Johar, Gaurav Kumar Sharma, Jai Kumar Bhatt, Ashish Kumar, Parvinder Singh, Tarun Varma, C. Periasamy, Ajay Agarwal, Dharmendar Boolchandani

  • Technical Paper

Effect of process parameters on filling behavior of PMMA in hot embossing

Jianzhi Li, Jiashun Liu, Feng Gong, Gao Yang

  • Technical Paper

Fabrication and characterization of controllable micro wavy pattern on cylindrical surface using ultra-precision diamond turning system

Ji-Young Jeong, Dong-Hyun Seo, Eun-Ji Gwak, Doo-Sun Choi, Jun Sae Han, Tae-Jin Je

  • Technical Paper

Rolling V-groove microstructures on glass using a modified PDMS mold

Ming-Huai Hsu, Yao-Yang Tsai, Jhao-Hong Gao, Sen-Yeu Yang

  • Technical Paper

Reflection based silicon incorporated silver coated fiber optic SPR sensor for refractive index and temperature measurement

Papiya Dhara, Vinod K. Singh, Anupam Kumar, Massimo Olivero, Guido Perrone

  • Technical Paper

Numerical simulation and experimental study of valveless piezoelectric mixing pump with built-in obstacles

Yeming Sun, Ruipeng Li, Yu Wang, Junyao Wang, Tianyi Su, Yiwei Wang