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Microsystem Technologies

Issue 8/2011

Content (17 Articles)

Technical Paper

MEMS-based resonant heat engine: scaling analysis

H. Bardaweel, B. S. Preetham, R. Richards, C. Richards, M. Anderson

Technical Paper

Digitally-controlled array of solid-state microcoolers for use in surgery

J. P. Carmo, M. F. Silva, J. F. Ribeiro, R. F. Wolffenbuttel, P. Alpuim, J. G. Rocha, L. M. Gonçalves, J. H. Correia

Technical Paper

Design, fabrication, and testing of VDP MEMS pressure sensors

Robert Cassel, Ahsan Mian, Todd Kaiser

Technical Paper

Multilayer high-aspect-ratio RF coil for NMR applications

C. Y. Hsieh, Y. T. Yeh, L. S. Fan

Technical Paper

Design, fabrication and characterization of piezoelectric micro-cantilever operated in liquid environment for ultrasound energy source applications

Kun Hoon Baek, Yeong-Tai Seo, Yong-Seung Bang, Dongyun Lee, Jong-Man Kim, Yong-Kweon Kim

Technical Paper

Dynamic simulation of a contact-enhanced MEMS inertial switch in Simulink®

Zhuoqing Yang, Haogang Cai, Guifu Ding, Hong Wang, Xiaolin Zhao

Technical Paper

RF-MEMS switch actuation pulse optimization using Taguchi’s method

M. Spasos, K. Tsiakmakis, N. Charalampidis, R. Nilavalan

Technical Paper

Design and fabrication of PZT microcantilevers with freestanding structure

Ziping Cao, Jinya Zhang, Hiroki Kuwano

Technical Paper

Determination of adhesive forces and sticking temperature of coated glasses for the hot-embossing-process

Christian Worsch, Jan Edelmann, Christian Rüssel, Andreas Schubert