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Microsystem Technologies

Issue 8/2013

Content (17 Articles)

Technical Paper

A flexible polyimide cable for implantable neural probe arrays

Ming-Yuan Cheng, Woo-Tae Park, Aibin Yu, Rui-Feng Xue, Kwan Ling Tan, Daquan Yu, Sang-Hyun Lee, Chee Lip Gan, Minkyu Je

Technical Paper

Electrical performance analysis and characterization of two port piezoelectric resonators

H. C. Qiu, P. Schwarz, D. Feili, S. Merzsch, E. Peiner, X. Z. Wu, H. Seidel

Technical Paper

Effects of package on the performance of MEMS piezoresistive accelerometers

Ping Li, Shiqiao Gao, Haipeng Liu, Jun Liu, Yunbo Shi

Technical Paper

Continuously tunable terahertz metamaterial employing a thermal actuator

Xiuhan Li, Tianyang Yang, Wangqiang Zhu, Xiaoguang Li

Technical Paper

Design and simulation of a high-performance Z-axis SOI-MEMS accelerometer

Abdelhameed Sharaf, Sherif Sedky

Technical Paper

Fabrication of an hermetically packaged silicon resonator on LTCC substrate

Nguyen Van Toan, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono

Technical Paper

Fabrication of microstructures on different materials by diode-pumped solid state laser writing for microfluidics applications

Qiuling Chen, Gabriele Maccioni, Qiuping Chen, Adriano Sacco, Sergio Ferrero, Luciano Scaltrito

Technical Paper

Challenges in fabrication and testing of piezoelectric MEMS with a particular focus on energy harvesters

Mehdi Rezaei, Jonathan Lueke, Don Raboud, Walied Moussa

Technical Paper

Hydrogen sensing characteristics of vertical type hydrogen sensors based on porous 3C-SiC with catalyst materials

K.-S. Kim, G.-S. Chung, Ahmed A. Al-Ghamdi, Fahrettin Yakuphanoglu

Technical Paper

A MEMS sandwich differential capacitive silicon-on-insulator accelerometer

Yangxi Zhang, Gang Yang, Chengchen Gao, Yilong Hao

Technical Paper

Surface acoustic wave based sensors employing ionic liquid for hydrogen sulfide gas detection

Yoshinobu Murakawa, Motoaki Hara, Hiroyuki Oguchi, Yuichiro Hamate, Hiroki Kuwano

Technical Paper

Anti-smudge screening apparatus for electronic touch screens

Bharat Bhushan, Palanikkumaran Muthiah