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Microsystem Technologies

Issue 8/2015

Content (25 Articles)

Technical Paper

Orthogonal micro-fluxgate with S-shape excitation wire and 3D solenoid detection coil

Bo Guo, Shibin Liu, Shanglin Yang, Guifang Li, Juping Li, Xiaoyan Sun

Technical Paper

Three-dimensional simulation of surface topography evolution in the Bosch process by a level set method

Xiao-Qian Li, Zai-Fa Zhou, Wei-Hua Li, Qing-An Huang

Technical Paper

Aspects of cavity filling with nano imprint

Hella-C. Scheer, M. Papenheim, K. Dhima, S. Wang, C. Steinberg

Technical Paper

Design and optimization of cantilever based piezoelectric micro power generator for cardiac pacemaker

Mohd H. S. Alrashdan, Azrul Azlan Hamzah, BurhanuddinYeop Majlis

Technical Paper

Room temperature Si–Ti thermopile THz sensor

Sofiane Ben Mbarek, Sébastien Euphrasie, Thomas Baron, Laurent Thiery, Pascal Vairac, Danick Briand, Jean-Paul Guillet, Laurent Chusseau

Technical Paper

Void-free BCB adhesive wafer bonding with high alignment accuracy

Zhen Song, Zhimin Tan, Litian Liu, Zheyao Wang

Technical Paper

Nano–bio interface: the characterization of functional bio interface on silicon nanowire

A. Wesam Al-Mufti, U. Hashim, Md. Mijanur Rahman, Tijjani Adam

Technical Paper

The fabrication of back etching 3C-SiC-on-Si diaphragm employing KOH + IPA in MEMS capacitive pressure sensor

Noraini Marsi, Burhanuddin Yeop Majlis, Faisal Mohd-Yasin, Azrul Azlan Hamzah

Technical Paper

Characterisation of demoulding parameters in micro-injection moulding

C. A. Griffiths, G. Tosello, S. S. Dimov, S. G. Scholz, A. Rees, B. Whiteside

Technical Paper

A planar fractal micro-transformer with air core and hilbert curve

Yong Zhu, Fahimullah Khan, Junwei Lu, Dzung Viet Dao

Technical Paper

Design of a monolithic integrated three-dimensional MEMS bionic vector hydrophone

Guo Jun Zhang, Lin Xian Liu, Wen Dong Zhang, Chen Yang Xue

Technical Paper

Modeling in vitro neural electrode interface in neural cell culture medium

Tao Sun, Wei Mong Tsang, Woo-Tae Park, Kangjian Cheng, Srinivas Merugu

Technical Paper

Design and driving characteristic researches of a novel bionic stepping piezoelectric actuator with large load capacity based on clamping blocks

Shupeng Wang, Zhihui Zhang, Luquan Ren, Hongwei Zhao, Yunhong Liang, Bing Zhu

Technical Paper

A microfluidic device for generation of chemical gradients

Yanyan Ge, Qiu An, Yandong Gao, Yunfei Chen, Deyu Li

Technical Paper

Design of a novel RF MEMS square resonator

Q. P. Wang, J. F. Bao, Y. Ling, X. Y. Li