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Microsystem Technologies

Issue 8/2024

Content (10 Articles)

  • Technical Paper

A comprehensive modeling of a 6-axis single proof mass MEMS-based piezoelectric IMU

Mohamed Hadj Said, Dorra Nasr, Samer Lahouar, Mounir Mansour, Fares Tounsi

  • Open Access
  • Technical Paper

Highly integrable silicon micropumps using lateral electrostatic bending actuators

Sebastian Uhlig, Matthieu Gaudet, Sergiu Langa, Christine Ruffert, Marcel Jongmanns, Harald Schenk

  • Technical Paper

Quantification of internal resistance of microfluidic photosynthetic power cells

Kirankumar Kuruvinashetti, Hemanth Kumar Tanneru, Pragasen Pillay, Muthukumaran Packirisamy

  • Technical Paper

Design and analysis of micro inertial switch with magnetic latch and adjustable threshold

Xinyue Wang, Chao Zhi, Yanjun Li, Mingshan Qu, Zhuang Xiong

  • Technical Paper

Compact stick–slip piezoelectric rotary motor with reduced undesired backward motion

Byeongkyu Lim, Namseon Jang, Donghyun Hwang