Issue 9/2011
Content (18 Articles)
A parameter identification method for thermal flying-height control sliders
Gang Sheng, Jianfeng Xu
Review of MEMS flow sensors based on artificial hair cell sensor
Mohd Norzaidi Mat Nawi, Asrulnizam Abd Manaf, Mohd Rizal Arshad, Othman Sidek
Numerical study of enhancing the mixing effect in microchannels via transverse electroosmotic flow by placing electrodes on top and bottom of the channel
Hongjun Song, Dawn J. Bennett
Polymeric (SU-8) optical microscanner driven by electrostatic actuation
Seung-Hwan Moon, Min-Ho Jun, Jae-Yong An, Jong-Hyun Lee
On the tunability of a MEMS based variable capacitor with a novel structure
Hamed Mobki, Morteza H. Sadeghi, Saeid Afrang, Ghader Rezazadeh
Design and fabrication of implantable pressure sensing resistor sensor for human bladder monitoring system
Jonghyun Kim, Bumkyoo Choi
Device for oxide dots fabrication with copper wire as cathode probe
K. Sathiyaraj, K. Kanivalan, P. Venkatesan, K. Rajendran, S. Kumaran
Design and realization of micro structured surfaces for thermodynamic applications
Andreas Schubert, Matthias Hackert-Oschätzchen, Gunnar Meichsner, Mike Zinecker
An electrothermally excited dual beams silicon resonant pressure sensor with temperature compensation
Zhangyang Tang, Shangchun Fan, Weiwei Xing, Zhanshe Guo, Zhengyuan Zhang
Design of shrinkage microvalve in microchannel with hydrophilic and hydrophobic walls
Ping Zhang, Yongbo Deng, Yongshun Liu, Yihui Wu
Improvement of damping performance by splitting damping material
Hajime Eguchi, Hiromitsu Masuda, Eiji Soga
Photoresist-based integration of enzyme functionality into MEMS
Nicole Thomas, Ilkka Lähdesmäki, Babak A. Parviz
Fabrication and electrical characterization of integrated nano-scale fluidic channels
A. Afanasiev, I. Lähdesmäki, B. A. Parviz
Proton beam writing a platform technology for high quality three-dimensional metal mold fabrication for nanofluidic applications
J. A. van Kan, P. G. Shao, Y. H. Wang, P. Malar
Dielectric property improvement of polymer-nanosized strontium titanate-composites for applications in microelectronics
Thomas Hanemann, Holger Gesswein, Benedikt Schumacher
Development of an injection molding tool for complex microfluidic geometries
Emil J. Geiger, Dieudonne A. Mair, Frank Svec, Albert P. Pisano
Influence and limits of sintering temperatures on the movability of shaft-to-collar connections formed by two-component micro powder injection moulding
Andreas Ruh, Volker Piotter, Klaus Plewa, Hans-Joachim Ritzhaupt-Kleissl, Jürgen Haußelt