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01-07-2010 | Technical Paper | Issue 7/2010

Microsystem Technologies 7/2010

Microthermoforming of nanostructured polymer films: a new bonding method for the integration of nanostructures in 3-dimensional cavities

Journal:
Microsystem Technologies > Issue 7/2010
Authors:
Markus Heilig, Stefan Giselbrecht, Andreas Guber, Matthias Worgull

Abstract

In this paper an approach will be presented to integrate selective nanostructured surfaces in 3-dimensional cavities. For this purpose, the technologies of nanoimprinting, micro- thermoforming, and thermal bonding will be combined. In a first step the nanostructures are patterned onto the surface of polymer films by nanoimprinting. In a second step the structured film is formed into already moulded polymer cavities by microthermoforming. During this micro-thermoforming step, a thermal bonding process is accomplished in parallel. Geometrical modifications of the nanostructures due to the uniaxial and biaxial stretching of the polymer film are measured, described, and compared with an analytical model.

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