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2011 | OriginalPaper | Chapter

Microvalves

Author : Prof. Dr. rer. nat. Werner Karl Schomburg

Published in: Introduction to Microsystem Design

Publisher: Springer Berlin Heidelberg

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Abstract

Microvalves have a lot of potential applications. They can be employed for dosing of small liquid volumes, controlling pneumatically or hydraulically driven robots or machines, and as a pilot valve which switches a larger valve.

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Literature
51.
Franz J, Baumann H, Trah H-P (1996) A monolithic silicon micro-liquid handling system with bimetallic valve and calorimetric flow sensor. In: Proceedings of the 5th international conference on new actuators, ACTUATOR’96, Bremen, 1996, pp 29–32
58.
Henning AK (2003) Improved gas flow model for microvalves. In: Transducers’03, pp 1550–1553
59.
Rogge T, Rummler Z, Schomburg WK (2004) Polymer micro valve with a hydraulic piezo-drive fabricated by the AMANDA process. Sens Actuators A 110:206–212CrossRef
60.
Jerman H (1991) Electrically-activated, normally-closed diaphragm valves. In: Transducers’91, pp 1045–1048
61.
Shikida M, Sato K (1994) Characterization of an electrostatically-driven gas valve under high pressure conditions. In: Proceedings of the IEEE MEMS, pp 235–240
62.
Wagner B, Quenzer HJ, Hoerschelmann S, Lisec T, Juerss M (1996) Bistable microvalves for implantable drug delivery systems. In: Proceedings of the 5th international conference on new actuators, ACTUATOR’96, 1996, pp 33–36
63.
Huff MA, Gilbert JR, Schmidt MA (1993) Flow characteristics of a pressure-balanced microvalve. In: Proceedings of the transducers, 1993, pp 98–101
Metadata
Title
Microvalves
Author
Prof. Dr. rer. nat. Werner Karl Schomburg
Copyright Year
2011
Publisher
Springer Berlin Heidelberg
Book
Introduction to Microsystem Design

Print ISBN: 978-3-642-19488-7

Electronic ISBN: 978-3-642-19489-4

Copyright Year: 2011

DOI
https://doi.org/10.1007/978-3-642-19489-4_16