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2017 | OriginalPaper | Chapter

4. Nanoschichten

Author : Wolfgang R. Fahrner

Published in: Nanotechnologie und Nanoprozesse

Publisher: Springer Berlin Heidelberg

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Zusammenfassung

Allgemein wird die physikalische Abscheidung (physical vapor deposition, PVD) aus der Gasphase in vier Gruppen unterteilt, nämlich (i) Aufdampfung, (ii) Sputtern, (iii) Ionenplattieren und (iv) Laserabtrag. Die ersten drei Verfahren erfolgen bei kleineren Drücken. Ein grober Überblick ist in Abb. 4.1 zu sehen.
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Metadata
Title
Nanoschichten
Author
Wolfgang R. Fahrner
Copyright Year
2017
Publisher
Springer Berlin Heidelberg
DOI
https://doi.org/10.1007/978-3-662-48908-6_4