New fabrication method for micro-pyramidal vertical probe array for probe cards

This paper presents a novel, precision process for fabricating a micro metal vertical probe array with various tip angles. The fabrication process includes an inclined and multiple-exposure in ultraviolet (UV) lithographic and Ni electroforming technology. Because of the light passing through an optical transparent homogenous material, the materials’ refractive index results in light path deflection. By changing the photomask and workpiece inclination, controllable various tip angles can be fabricated. The experimental results showed that micro metal vertical probes with 54°, 60° and 68° tip angles are achieved. The micro-pyramidal vertical probe array can be used in vertical-type probe cards without the conventional complicated assembly.