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2011 | OriginalPaper | Chapter

3. Overview of Experimental Tools

Author : Weronika Walkosz

Published in: Atomic Scale Characterization and First-Principles Studies of Si₃N₄ Interfaces

Publisher: Springer New York

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Abstract

This chapter reviews a range of transmission electron microscopy (TEM) techniques, including conventional electron microscopy, High-Resolution Electron Microscopy (HREM), Z-contrast imaging, Electron Energy-Loss Spectroscopy (EELS), and spectrum imaging (SI). The latter three will be discussed in relation to Scanning TEM (STEM). The key aspects of these techniques will be described in detail, emphasizing their strengths and drawbacks. Moreover, various simulation techniques will be discussed in the chapter, and a short summary of advances in electron optics will be provided.

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Title: Overview of Experimental Tools
Author: Weronika Walkosz
Publisher: Springer New York
Book: Atomic Scale Characterization and First-Principles Studies of Si₃N₄ Interfaces
Print ISBN: 978-1-4419-7816-5

Electronic ISBN: 978-1-4419-7817-2

Copyright Year: 2011
DOI: https://doi.org/10.1007/978-1-4419-7817-2_3

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