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2020 | OriginalPaper | Chapter

Parametric Resonance of a Micro-beam with Flexible Support Under Fringing Field Excitation

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Abstract

A new resonance structure with flexible support under electrostatic fringing field excitation is designed. This structure can be used in sensor. In this paper, the nonlinear frequency responses of the movable beam in resonance structure are analyzed by the Method of Multiple Scales. The effects of electrode thickness, slit gap and initial displacement on the vibration of the movable beam are investigated in detail. The key results are as follows. A smaller electrode thickness and slit gap can lead to a larger change of the actuated frequency, and they can also lead to a larger vibration amplitude. The initial displacement has an influence on the frequency response, but this influence is not obvious, since the electrostatic force is small when the initial displacement is not large. This resonance structure can avoid superposition of input signal and output signal. Thus, the signal-to-noise ratio and the accuracy of the sensor can be improved.

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Metadata
Title
Parametric Resonance of a Micro-beam with Flexible Support Under Fringing Field Excitation
Author
Zhichong Wang
Copyright Year
2020
DOI
https://doi.org/10.1007/978-3-030-47883-4_22

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