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Journal of Materials Science: Materials in Electronics
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18-07-2016

Properties of nano-thick BaSnO3/Cu/BaSnO3 multilayer thin films: the role of substrate temperature

Authors: Muying Wu, Shihui Yu, Lin He, Lei Yang

Published in: Journal of Materials Science: Materials in Electronics | Issue 12/2016

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Abstract

The nano-thick BaSnO3/Cu/BaSnO3 multilayer thin films have been designed and fabricated on glass by magnetron sputtering. The thickness of BaSnO3, Cu, and BaSnO3 layer in the multilayer thin films was set at 50, 10, and 50 nm, respectively. The structural, electrical, and optical properties of multilayer thin films were investigated with respect to the variation of substrate temperature. The average optical transmittance in the visible range of wavelengths (400–800 nm) shows an increase for the multilayer thin films grown at a temperature below 250 °C. A low resistivity (<10−4 Ω cm) for the multilayer thin films is found to be retained until 200 °C, followed by a quickly increase as the substrate temperature further increases to 300 °C. In addition, a mechanism for the variation of electrical and optical properties with the substrate temperature was proposed.
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Metadata
Title
Properties of nano-thick BaSnO3/Cu/BaSnO3 multilayer thin films: the role of substrate temperature
Authors
Muying Wu
Shihui Yu
Lin He
Lei Yang
Publication date
18-07-2016
Publisher
Springer US
Published in
Journal of Materials Science: Materials in Electronics / Issue 12/2016
Print ISSN: 0957-4522
Electronic ISSN: 1573-482X
DOI
https://doi.org/10.1007/s10854-016-5392-6

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