It is a waste of time to proceed with
analysis of your XEDS spectrum or image without first carrying out
analysis. Qualitative analysis requires that
peak in the spectrum be identified unambiguously, with statistical certainty, otherwise it should be ignored for both subsequent quantitative analysis and imaging. We emphasize this point because of the many opportunities for the misidentification of small peaks in the spectrum. In this chapter, we’ll deal initially with acquisition and identification of the elemental information in spectra and images. First, we will show you how to choose the best operating conditions for your particular AEM and XEDS system. Then we’ll explain the best way to obtain a spectrum for qualitative analysis. You have to acquire a spectrum with sufficient X-ray counts to allow you to draw the right conclusions with a given degree of confidence. There are a few simple rules to follow which allow you to do this.