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Acoustic Microscopy Read chapter Read first chapter

2018 | OriginalPaper | Chapter

91. Scanning Electron Microscopy

Author : Yasuyuki Okano

Published in: Compendium of Surface and Interface Analysis

Publisher: Springer Singapore

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Abstract

Scanning electron microscope (SEM) is an instrument that can image and analyze specimens using a focused electron beam. When the focused electron beam irradiates a specimen, various signals are generated in consequence of the interaction of the incident electron with atoms in the specimen (Fig. 91.1) (Reimer in Scanning electron microscopy: physics of image formation and microanalysis. Springer Verlag, 1998 [1]). Among the signals generated from the surface of the specimen, secondary electrons (SEs) and backscattered electrons (BSEs) can be detected for observation of shape and composition (material contrast).

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Literature
1.
Reimer, L.: Scanning Electron Microscopy: Physics of Image Formation and Microanalysis. Springer Verlag (1998)
2.
Fransen, M., Vanrooy, L., Tiemeijer, P., Overwijk, M., Faber, J., Kruit, P.: On the electron-optical properties of the ZrO/W schottky electron emitter. Adv Imaging Electron Phy. 111, 91–127 (1999)CrossRef
3.
Pease, R.: Low-voltage scanning electron microscopy. 176–187 (1967)
4.
Terasaki, O., Cho, H., Cho, M., Jeong, H., Asahina, S., Sakuda, Y., Suga, M., Kazumori, H., Kudo, M., Nokuo, T., Liu, Z., Stevens, S., Anderson, M., GaleanoNunez, D., Schuth, F., Kjellman, T., Alfredsson, V., Han, L., Che, S., Deng, H., Yaghi, O., Cho, K., Ryoo, R.: Novel structural characterisations of insulating and electron beam sensitive materials employing low voltage high resolution scanning electron microscopy. JEOL News 48, 21–31 (2013)
5.
Suga, M., Asahina, S., Sakuda, Y., Kazumori, H., Nishiyama, H., Nokuo, T., Alfredsson, V., Kjellman, T., Stevens, S., Cho, H., Cho, M., Han, L., Che, S., Anderson, M., Schuth, F., Deng, H., Yaghi, O., Liu, Z., Jeong, H., Stein, A., Sakamoto, K., Ryoo, R., Terasaki, O.: Recent progress in scanning electron microscopy for the characterization of fine structural details of nano materials. Prog. Solid State Chem. 42, 1–21 (2014)CrossRef
Metadata
Title
Scanning Electron Microscopy
Author
Yasuyuki Okano
Copyright Year
2018
Publisher
Springer Singapore
Book
Compendium of Surface and Interface Analysis

Print ISBN: 978-981-10-6155-4

Electronic ISBN: 978-981-10-6156-1

Copyright Year: 2018

DOI
https://doi.org/10.1007/978-981-10-6156-1_91

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