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Scanning Electrochemical Potential Microscopy (SECPM) and Electrochemical STM (EC-STM) Read chapter Read first chapter

2015 | OriginalPaper | Chapter

3. Scanning Probe Microscopy for Nanolithography

Author : C. B. Samantaray

Published in: Surface Science Tools for Nanomaterials Characterization

Publisher: Springer Berlin Heidelberg

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Abstract

Scanning probe microscopy (SPM) has been used for both fabrication and characterization techniques of nanomaterials, nanostructures, or nanopatterning. There are two fundamental approaches such as scanning tunneling microscopy (STM) and atomic force microscopy (AFM) that are being used for the scanning probe lithography (SPL) process. In this chapter, we will discuss a recent development of nanolithography based upon new ideas and innovations of scanning probe microscopy and direct-write approach.

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previous chapter Recovering Time-Resolved Imaging Forces in Solution by Scanning Probe Acceleration Microscopy: Theory and Application
next chapter Kelvin Probe Force Microscopy in Nanoscience and Nanotechnology
Literature
1.
Binnig G, Rohrer H, Gerber C, Weibel E (1982) Tunneling through a controllable vacuum gap. Appl Phys Lett 40:178–180CrossRef
2.
Binning G, Rohrer H, Gerber C, Weibel E (1982) Surface studies by scanning tunneling techniques. Phys Rev Lett 49:57–61CrossRef
3.
Binnig G, Quate CF, Gerber C (1986) Atomic force microscope. Phys Rev Lett 56:930–933CrossRef
4.
Piner RD, Zhu J, Xu F, Hong S, Mirkin CA (1999) “Dip-Pen” nanolithography. Science 283:661–663CrossRef
5.
Amro NA, Xu S, Liu G-Y (2000) Patterning surfaces using tip-directed displacement and self-assembly. Langmuir 16:3006–3009CrossRef
6.
Maoz R, Frydman E, Cohen SR, Sagiv J (2000) Constructive nanolithography: site-defined silver self-assembly on nanoelectrochemically patterned monolayer surfaces. Adv Mater 12:424–429CrossRef
7.
Maoz R, Frydman E, Cohen SR, Sagiv J (2000) Constructive nanolithography: inert monolayers as patternable templates for in-situ nanofabrication of metal–semiconductor- organic surface structures; a generic approach. Adv Mater 12:725–731CrossRef
8.
Demers L, Ginger DS, Park S-J, Li Z, Chung S-W, Mirkin CA (2002) Direct patterning of modified oligonucleotides on metals and Li, insulators by dip-pen nanolithography. Science 296:1836–1838CrossRef
9.
Lee K-B, Park S-J, Mirkin CA, Smith JC, Mrksich M (2002) Protein nanoarrays generated by dip-pen nanolithography. Science 295:1702–1705CrossRef
10.
Hyun J, Ahn SJ, Lee WK, Chilkoti A, Zauscher S (2002) Molecular recognition-mediated fabrication of protein nanostructures by dip-pen lithography. Nano Lett 2:1203–1207CrossRef
11.
Lee K-B, Lim J-H, Mirkin CA (2003) Protein nanostructures formed via direct-write dip-pen nanolithography. J Am Chem Soc 125:5588–5589CrossRef
12.
Chow DC, Lee W-K, Zauscher S, Chilkoti A (2005) Enzymatic fabrication of DNA nanostructures: extension of a self-assembled oligonucleotide monolayer on gold arrays. J Am Chem Soc 127:14122–14123CrossRef
13.
LaFratta CN, Walt DR (2008) Very high density sensing array. Chem Rev 108:614–637CrossRef
14.
Jonkheijm P, Weinrich D, Schröder H, Niemeyer CM, Waldmann H (2008) Chemical strategies for generating protein biochips. Angew Chem Int Ed 47:9618–9647CrossRef
15.
Braunschweig AB, Huo F, Mirkin CA (2009) Molecular printing. Nat Chem 1:353–358CrossRef
16.
Paxton WF, Spruell JM, Stoddart JF (2009) Heterogeneous catalysis of a copper-coated atomic force microscopy tip for direct-write click chemistry. J Am Chem Soc 131:6692–6694CrossRef
17.
Unruh DA, Mauldin C, Pastine SJ, Rolandi M, Fréchet JMJ (2010) Bifunctional patterning of mixed monolayer surfaces using scanning probe lithography for multiplexed directed assembly. J Am Chem Soc 132:6890–6891CrossRef
18.
Lei Y, Yang S, Wu M, Wilde G (2011) Surface patterning using templates: concept, properties and device applications. Chem Soc Rev 40:1247–1258CrossRef
19.
Tseng AA, Notargiacomo A, Chen TP (2005) Nanofabrication by scanning probe microscope lithography: a review. J Vac Sci Technol B 23(3):877–894CrossRef
20.
Saavedra HM, Mullen TJ, Zhang P, Dewey DC, Claridge SA, Weiss PS (2010) Hybrid strategies in nanolithography. Rep Prog Phys 73:036501CrossRef
21.
Moreno-Flores S, Toca-Herrera JL (2013) Hybridizing surface probe microcopies: towards a full description of the meso- and nanoworlds. CRC Press/Taylor & Francis Group, New York
22.
Abraham DW, Mamin HJ, Ganz E, Clarke J (1986) Surface modification with the scanning tunneling microscope. IBM J Res Dev 30:492–499CrossRef
23.
McCord MA, Pease RFW (1986) Lithography with the scanning tunneling microscope. J Vac Sci Technol B 4:86–88CrossRef
24.
McCord MA, Pease RFW (1987) Exposure of calcium-fluoride resist with the scanning tunneling microscope. J Vac Sci Technol B 5:430–433CrossRef
25.
McCord MA, Kern DP, Chang THP (1988) Direct deposition of 10-nm metallic features with the scanning tunneling microscope. J Vac Sci Technol B 6:1877–1880CrossRef
26.
Dagata JA, Schneir J, Harary HH, Evans CJ, Postek MT, Bennett J (1990) Modification of hydrogen-passivated silicon by a scanning tunneling microscope operating in air. Appl Phys Lett 56:2001–2003CrossRef
27.
Snow ES, Campbell PM (1994) Fabrication of Si nanostructures with an atomic-force microscope. Appl Phys Lett 64:1932–1934CrossRef
28.
Sheats JR, Smith BW (eds) (1998) Microlithography: science and technology. Dekker, New York
29.
Cappella B, Sturm H (2002) Comparison between dynamic plowing lithography and nanoindentation methods. J Appl Phys 91:506–512CrossRef
30.
Iwasaki H, Yoshinobu T, Sudoh K (2003) Nanolithography on SiO2/Si with a scanning tunnelling microscope. Nanotechnology 14:R55–R62CrossRef
31.
Sugimoto Y, Abe M, Hirayama S, Oyabu N, Custance O, Morita S (2005) Atom inlays performed at room temperature using atomic force microscopy. Nat Mater 4:156–159CrossRef
32.
Sykes ECH, Fernandez-Torres LC, Nanayakkara SU, Mantooth BA, Nevin RM, Weiss PS (2005) Observation and manipulation of subsurface hydride in Pd{111} and its effect on surface chemical, physical, and electronic properties. Proc Natl Acad Sci USA 102:17907–17911CrossRef
33.
Li Y, Maynor BW, Liu J (2001) Electrochemical AFM ‘dip-pen’ nanolithography. J Am Chem Soc 123:2105–2106CrossRef
34.
Ginger DS, Zhang H, Mirkin CA (2004) The evolution of dip-pen nanolithography. Angew Chem Int Ed 43:30–45CrossRef
35.
Salaita K, Wang Y, Fragala J, Vega RA, Liu C, Mirkin CA (2006) Massively parallel dip-pen nanolithography with 55000-Pen two-dimensional arrays. Angew Chem Int Ed 45:7220–7223CrossRef
36.
Huo F, Zheng Z, Zheng G, Giam LR, Zhang H, Mirkin CA (2008) Polymer pen lithography. Science 321:1658–1660CrossRef
37.
Wadu-Mesthrige K, Amro NA, Garno JC, Xu S, Liu G-Y (2001) Fabrication of nanometer-sized protein patterns using atomic force microscopy and selective immobilization. Biophys J 80:1891–1899CrossRef
38.
Shi J, Chen J, Cremer PS (2008) Sub-100 nm of supported bilayers by nanoshaving lithography. J Am Chem Soc 130:2718–2719CrossRef
39.
Sun S, Chong KSL, Leggett GJ (2002) Nanoscale molecular patterns fabricated by using scanning near-field optical lithography. J Am Chem Soc 124:2414–2415CrossRef
40.
Sun S, Leggett GJ (2002) Generation of nanostructures by scanning near-field photolithography of self-assembled monolayers and wet chemical etching. Nano Lett 2:1223–1227CrossRef
41.
Sun S, Leggett GJ (2004) Matching the resolution of electron beam lithography by scanning near-field photolithography. Nano Lett 4:1381–1384CrossRef
42.
Ul-Haq E, Liu Z, Zhang Y, Ahmad SAA, Wong L-S, Armes SP, Hobbs JK, Leggett G, Micklefield J, Roberts CJ, Weaver JMR (2010) Parallel scanning near-field photolithography: the snomipede. Nano Lett 10:4375–4380CrossRef
43.
Leggett GJ (2012) Light-directed nanosynthesis: near-field optical approaches to integration of the top-down and bottom-up fabrication paradigms. Nanoscale 4:1840–1855CrossRef
44.
Bonnell DA, Basov DN, Bode M, Diebold U, Kalinin SV, Madhavan V, Novotny L, Salmeron M, Schwarz UD, Weiss PS (2012) Imaging physical phenomena with local probes: from electrons to photons. Rev Mod Phys 84:1343–1381CrossRef
45.
Bonnell DA, Kalinin SV (2013) Scanning probe microscopy for energy research. World Scientific, SingaporeCrossRef
46.
Tawfick S, Volder MD, Copic D, Park SJ, Oliver CR, Polsen ES, Roberts MJ, Hart AJ (2012) Engineering of micro- and nano structured surfaces with anisotropic geometries and properties. Adv Mater 24:1628–1674CrossRef
47.
Scappucci G, Capellini G, Johnston B, Klesse WM, Miwa JA, Simmons MY (2011) A complete fabrication route for atomic-scale donor-based devices in single-crystal Germanium. Nano Lett 11:2272–2279CrossRef
48.
Scappucci G, Capellini G, Lee WCT, Simmons MY (2009) Atomic-scale patterning of hydrogen terminated Ge(001) by scanning tunneling microscopy. Nanotechnology 20:495302 (6 pp)CrossRef
49.
van Dorp WF, van Someren B, Hagen CW, Kruit P, Crozier PA (2005) Approaching the resolution limit of nanometer-scale electron beam-induced deposition. Nano Lett 5:1303–1307CrossRef
50.
van Dorp WF, Hagen CW, Crozier PA, Kruit P (2008) Growth behavior near the ultimate resolution of nanometer-scale focused electron beam-induced deposition. Nanotechnology 19:225305 (9 pp)CrossRef
51.
Fuechsle M, Miwa JA, Mahapatra S, Ryu H, Lee S, Warschkow O, Hollenberg LCL, Klimeck G, Simmons MY (2012) A single-atom transistor. Nat Nanotechnol 7:242CrossRef
52.
Utke I, Moshkalev S, Russel P (eds) (2012) Nanofabrication using focused ion and electron beams: principles and applications. Oxford University Press, New York
53.
Manfrinato VR, Zhang L, Su D, Duan H, Hobbs RG, Stach EA, Berggren KK (2013) Resolution limits of electron-beam lithography toward the atomic scale. Nano Lett 13:1555–1558CrossRef
54.
Donev EU, Hastings JT (2009) Electron-beam-induced deposition of platinum from a liquid precursor. Nano Lett 9:2715–2718CrossRef
55.
Donev EU, Hastings JT (2009) Liquid-precursor electron-beam-induced deposition of Pt nanostructures: dose, proximity, resolution. Nanotechnology 20:505302 (7 pp)CrossRef
56.
Donev EU, Nehru N, Schardein G, Wright J, Chamberlain A, Samantaray CB, Hastings JT (2011) Recent advances in liquid-phase electron-beam induced deposition: characterizing growth processes and optical properties. Microsc Microanal 17:438CrossRef
57.
Donev EU, Schardein G, Wright JC, Hastings JT (2011) Substrate effects on the electron- beam-induced deposition of platinum from a liquid precursor. Nanoscale 3:2709–2717CrossRef
58.
Schardein G, Donev EU, Hastings JT (2011) Electron-beam-induced deposition of gold from aqueous solutions. Nanotechnology 22:015301CrossRef
59.
Hoshino T, Morishima K (2011) Electron-beam direct processing on living cell membrane. Appl Phys Lett 99:174102–1CrossRef
60.
Ocola LE, Joshi-Imre A, Kessel C, Chen B, Park J, Gosztola D, Divan R (2012) Growth characterization of electron-beam-induced silver deposition from liquid precursor. J Vac Sci Technol B 30:06FF08-07CrossRef
61.
Liu Y, Chen X, Noh KW, Dillon SJ (2012) Electron beam induced deposition of silicon nanostructures from a liquid phase precursor. Nanotechnology 23:385302CrossRef
62.
Bresin M, Chamberlain A, Donev EU, Samantaray CB, Schardein GS, Hastings JT (2013) Electron-beam induced deposition of bimetallic nanostructures from bulk liquids. Angew Chem Int Ed 52:1–5CrossRef
63.
Donev EU, Samantaray CB, Bresin M, Hastings JT (2013) Recent advances in liquid phase electron beam induced processing, silicon nitride etching and palladium deposition. In: Proceedings of the 39th international conference on micro and nano engineering (MNE), 16–19 Sept London, UK, 2013
64.
Bresin M, Nehru N, Hastings JT (2013) Focused electron-beam induced deposition of plasmonic nanostructures from aqueous solutions. Proc SPIE 8613:861306CrossRef
65.
Giam LR, He S, Horwitz NE, Eichelsdoerfer DJ, Chai J, Zheng Z, Kim D, Shim W, Mirkin CA (2012) Positionally defined, binary semiconductor nanoparticles synthesized by scanning probe block copolymer lithography. Nano Lett 12:1022–1025CrossRef
66.
Ganesh M, Nachman J, Mao Z, Lyons A, Rafailovich M, Gross R (2013) Patterned enzymatic degradation of poly (ε-caprolactone) by high-affinity microcontact printing and polymer pen lithography. Biomacromolecules 14:2470–2476CrossRef
67.
Tang Z, Wei Q, Wei A (2011) Metal-mesh lithography. ACS Appl Mater Interfaces 3:4812–4818CrossRef
68.
Duvigneau J, Schönherr H, Vancso GJ (2011) Scanning thermal lithography of tailored tert-Butyl ester protected carboxylic acid functionalized (Meth) acrylate polymer platforms. ACS Appl Mater Interfaces 3:3855–3865CrossRef
69.
McConney ME, Kulkarni DD, Jiang H, Bunning TJ, Tsukruk VV (2012) A new twist on scanning thermal microscopy. Nano Lett 12:1218–1223CrossRef
70.
Fan F-RF, Bard A (1995) STM on wet insulators: electrochemistry or tunneling. Science 270:1849–1851CrossRef
71.
Lipson AL, Hersam MC (2013) Conductive scanning probe characterization and nanopatterning of electronic and energy materials. J Phys Chem C 117:7953–7963CrossRef
72.
Ryu YK, Chiesa M, Garcia R (2013) Electrical characteristics of silicon nanowire transistors fabricated by scanning probe and electron beam lithographies. Nanotechnology 24:315205 (7 pp)CrossRef
73.
Dehzangi A, Larki F, Hutagalung SD, Naseri MG, Majlis BY, Navasery M, Hamid NA, Noor MM (2013) Impact of parameter variation in fabrication of nanostructure by atomic force microscopy nanolithography. PLOSONE 8:e65409CrossRef
74.
Haussmann A, Milde P, Erler C, Eng LM (2009) Ferroelectric lithography: bottom-up assembly and electrical performance of a single metallic nanowire. Nano Lett 9:763–768CrossRef
75.
Domanski L, Sengupta E, Bley K, Untch MB, Weber SAL, Landfester K, Weiss CK, Butt H-J, Berger R (2012) Kelvin probe force microscopy in nonpolar liquids. Langmuir 28:13892–13899CrossRef
76.
Gong J, Lipomi DJ, Deng J, Nie Z, Chen X, Randall NX, Nair R, Whitesides GM (2010) Micro- and nanopatterning of inorganic and polymeric substrates by indentation lithography. Nano Lett 10:2702–2708CrossRef
77.
Nedev S, Urban AS, Lutich AA, Feldmann J (2011) Optical force stamping lithography. Nano Lett 11:5066–5070CrossRef
78.
Gabriel MM, Kirschbrown JR, Christesen JD, Pinion CW, Zigler DF, Grumstrup EM, Mehl BP, Cating EEM, Cahoon JF, Papanikolas JM (2013) Direct imaging of free carrier and trap carrier motion in silicon nanowires by spatially-separated femto second pump − probe microscopy. Nano Lett 13:1336–1340CrossRef
79.
Zarzar LD, Swartzentruber BS, Harper JC, Dunphy DR, Brinker CJ, Aizenberg J, Kaehr B (2012) Multiphoton lithography of nanocrystalline platinum and palladium for site-specific catalysis in 3D microenvironments. J Am Chem Soc 134:4007–4010CrossRef
80.
Credgington D, Fenwick O, Charas A, Morgado J, Suhling K, Cacialli F (2010) High-resolution scanning near-field optical lithography of conjugated polymers. Adv Funct Mater 20:2842–2847CrossRef
81.
Ul-Haq E, Patole S, Moxey M, Amstad E, Vasilev C, Hunter CN, Leggett GJ, Spencer ND, Williams NH (2013) Photocatalytic nanolithography of self-assembled monolayers and proteins. ACS Nano 7(9):7610–7618CrossRef
82.
van Dorp WF, Zhang X, Feringa BL, Hansen TW, Wagner JB, Hosson JTMD (2012) Molecule-by-molecule writing using a focused electron beam. ACS Nano 6:10076–10081CrossRef
83.
Roberts NA, Fowlkes JD, Magel GA, Rack PD (2013) Enhanced material purity and resolution via synchronized laser assisted electron beam induced deposition of platinum. Nanoscale 5:408–415CrossRef
84.
Wu T-H, Lu H-H, Lin C-W (2012) Dependence of transport rate on area of lithography and pretreatment of tip in dip-pen nanolithography. Langmuir 28:14509–14513CrossRef
85.
Shim W, Brown KA, Zhou X, Rasin B, Liao X, Mirkin CA (2012) Multifunctional cantilever-free scanning probe arrays coated with multilayer graphene. Proc Natl Acad Sci U S A 109:18312–18317CrossRef
86.
Narui Y, Salaita KS (2012) Dip-pen nanolithography of optically transparent cationic polymers to manipulate spatial organization of proteolipid membranes. Chem Sci 3:794–799CrossRef
87.
Chang JB, Son JG, Hannon AF, Alexander-Katz A, Ross CA, Berggren KK (2012) Aligned sub-10-nm block copolymer patterns templated by post arrays. ACS Nano 6:2071–2077CrossRef
88.
Mickiewicz RA, Yang JKW, Hannon AF, Jung YS, Alexander-Katz A, Berggren KK, Ross CA (2010) Enhancing the potential of block copolymer lithography with polymer self-consistent field theory simulations. Macromolecules 43:8290–8295CrossRef
89.
Son JG, Chang JB, Berggren KK, Ross CA (2011) Assembly of sub-10-nm block copolymer patterns with mixed morphology and period using electron irradiation and solvent annealing. Nano Lett 11:5079–5084CrossRef
90.
Jeong S–J, Kim JY, Kim BH, Moon H–S, Kim SO (2013) Directed self-assembly of block copolymers for next generation nanolithography. Mater Today 16:468–473CrossRef
91.
Huang C-M, Yeh C-H, Chen L, Huang D–A, Kuo C (2013) Energetic-assisted scanning thermal lithography for patterning silver nanoparticles in polymer films. ACS Appl Mater Interfaces 5:120–127CrossRef
92.
Cheong LL, Paul P, Holzner F, Despont M, Coady DJ, Hedrick JL, Allen R, Knoll AW, Duerig U (2013) Thermal probe maskless lithography for 27.5 nm half-pitch Si technology. Nano Lett 13:4485–4491CrossRef
93.
Craston DH, Lin CW, Bard AJ (1988) High resolution deposition of silver in Nafion films with the scanning tunneling microscope. J Electrochem Soc 135(3):785–786CrossRef
94.
Kolb DM, Ullmann R, Will T (1997) Nanofabrication of small copper clusters on gold (111) electrodes by a scanning tunneling microscope. Science 275:1097–1099CrossRef
95.
Ullmann R, Will T, Kolb DM (1993) Nanoscale decoration of Au (111) electrodes with Cu clusters by an STM. Chem Phys Lett 209:238–242CrossRef
96.
Maynor BW, Li Y, Liu J (2001) Au “Ink” for AFM “Dip-Pen” nanolithography. Langmuir 17:2575–2578CrossRef
97.
Kwon G, Chu H, Yoo J, Kim H, Han C, Chung C, Lee J, Lee H (2012) Fabrication of uniform and high resolution copper nanowire using intermediate self-assembled monolayers through direct AFM lithography. Nanotechnology 23:185307CrossRef
98.
Li W, Virtanen JA, Penner RM (1992) Nanometer‐scale electrochemical deposition of silver on graphite using a scanning tunneling microscope. Appl Phys Lett 60:1181CrossRef
99.
Losilla NS, Oxtoby NS, Martinez J, Garcia F, Garcia R, Torrent MM, Veciana J, Rovira C (2008) Sub-50 nm positioning of organic compounds onto silicon oxide patterns fabricated by local oxidation nanolithography. Nanotechnology 19:455308 (6 pp)CrossRef
100.
Chiesa M, Garcia R (2010) Nanoscale space charge generation in local oxidation nanolithography. Appl Phys Lett 96:263112CrossRef
101.
Garcia R, Martinez RV, Martínez J (2006) Nano-chemistry and scanning probe nanolithographies. Chem Soc Rev 35:29–38CrossRef
102.
Martínez RV, Martínez J, Garcia R (2010) Silicon nanowire circuits fabricated by AFM oxidation nanolithography. Nanotechnology 21:245301 (5 pp)CrossRef
103.
Martinez J, Losilla NS, Biscarini F, Schmidt G, Borzenko T, Molenkamp LW, Garcia R (2006) Development of a parallel local oxidation nanolithography instrument. Rev Sci Instrum 77:086106-1-3CrossRef
104.
Martínez RV, García F, García R, Coronado E, Aliaga AF, Romero FM, Tatay S (2007) Nanoscale deposition of single-molecule magnets onto SiO2 patterns. Adv Mater 19:291–295CrossRef
105.
Lee JS, Chi YS, Choi IS, Kim J (2012) Local scanning probe polymerization of an organic monolayer covalently grafted on silicon. Langmuir 28:14496–14501CrossRef
106.
König T, Papke T, Kopyshev A, Santer S (2013) Atomic force microscopy nanolithography: fabrication of metallic nano-slits using silicon nitride tips. J Mater Sci 48:3863–3869CrossRef
107.
Jarro CA, Donev EU, Menguç MP, Hastings JT (2012) Silver patterning using an atomic force microscope tip and laser-induced chemical deposition from liquids. J Vac Sci Tech B 30:06FD02-6CrossRef
108.
Hawes EA, Hastings JT, Crofcheck C, Mengüç MP (2008) Spatially selective melting and evaporation of nanosized gold particles. Opt Lett 33:1383–1385CrossRef
109.
Zubir OE, Barlow I, Haq EU, Tajuddin HA, Williams NH, Leggett GJ (2013) Generic methods for micrometer- and nanometer-sale surface derivatization based on photochemical coupling of primary amines to monolayers of aryl azides on gold and aluminum oxide surfaces. Langmuir 29:1083–1092CrossRef
110.
Tizazu G, Adawi AM, Leggett GJ, Lidzey DG (2009) Photopatterning, etching, and derivatization of self-assembled monolayers of phosphonic acids on the native oxide of titanium. Langmuir 25(18):10746–10753CrossRef
111.
Dostert KH, Álvarez M, Koynov K, del Campo A, Butt HJ, Kreiter M (2012) Near field guided chemical nanopatterning. Langmuir 28:3699–3703CrossRef
112.
Lin WF, Li JR, Liu GY (2012) Near-field scanning optical microscopy enables direct observation of Moiré effects at the nanometer scale. ACS Nano 6:9141–9149CrossRef
113.
Samantaray CB, Hastings JT (2009) Amino-propyl-triethoxy-silane (APTES) on aluminum fiducial grids for spatial-phase-locked electron-beam lithography. J Vac Sci Technol B 27:2558CrossRef
114.
Samantaray CB, Todd Hastings J (2008) Self-assembled monolayer fiducial grids for spatial-phase-locked electron-beam lithography. J Vac Sci Technol B 26:2351CrossRef
115.
Samantaray CB, Hastings JT (2011) Deep UV patterning of 3-amino-propyl-triethoxy-silane self-assembled molecular layers on alumina. J Vac Sci Technol B 29:041603CrossRef
116.
Cheong LL, Lobez JM, Moon EE, Hastings JT, Smith HI (2011) Secondary-electron signal level measurements of self-assembled monolayers for spatial-phase-locked electron-beam lithography. J Vac Sci Technol B 29:06F308CrossRef
117.
Jung YS, Chang JB, Verploegen E, Berggren KK, Ross CA (2010) A path to ultranarrow patterns using self-assembled lithography. Nano Lett 10:1000–1005CrossRef
118.
Rosenberg SG, Barclay M, Fairbrother DH (2013) Electron induced reactions of surface adsorbed tungsten hexacarbonyl W (CO)6. Phys Chem Chem Phys 15:4002–4015CrossRef
119.
Böhler E, Warneke J, Swiderek P (2013) Control of chemical reactions and synthesis by low-energy electrons. Chem Soc Rev 42:9219–9231CrossRef
120.
Ramon LS, Cordoba R, Rodríguez LA, Magén C, Snoeck E, Gatel C, Serrano I, Ibarra MR, Teresa JMD (2011) Ultrasmall functional ferromagnetic nanostructures grown by focused electron-beam-induced deposition. ACS Nano 5:7781–7787CrossRef
121.
van Oven JC, Berwald F, Berggren KK, Kruit P, Hagen CW (2011) Electron-beam-induced deposition of 3-nm-half-pitch patterns on bulk Si. J Vac Sci Technol B 29:06F305CrossRef
122.
Hoshino T, Morishima K (2010) Electron beam induced in situ spatiotemporal nanofabrication towards intracellular nanorobotics. In: Proceedings of the 214th international conference on miniaturized systems for chemistry and life sciences, 3–7 Oct 2010, Groningen, p 1637
123.
Mackus AJM, Thissen NFW, Mulders JJL, Trompenaars PHF, Verheijen MA, Bol AA, Kessels WMM (2013) Direct-write atomic layer deposition of high-quality Pt nanostructures: selective growth conditions and seed layer requirements. J Phys Chem C 117:10788–10798CrossRef
124.
Han A, Vlassarev D, Wang J, Golovchenko JA, Branton D (2010) Ice lithography for nanodevice. Nano Lett 10:5056–5059
125.
Lee MH, Hwang CS (2011) Resistive switching memory: observations with scanning probe microscopy. Nanoscale 3:490–502CrossRef
126.
Kwon DH, Kim KM, Jang JH, Jeon JM, Lee MH, Kim GH, Li XS, Park GS, Lee B, Han S, Kim M, Hwang CS (2010) Atomic structure of conducting nanofilaments in TiO2 resistive switching memory. Nat Nanotechnol 5:148–153CrossRef
127.
Balke N, Bonnell D, Ginger DS, Kemerink M (2012) Scanning probes for new energy materials: probing local structure and function. MRS Bull 37:633–641CrossRef
128.
O’Dea R, Brown LM, Hoepker N, Marohn JA, Sadewasser S (2012) Scanning probe microscopy of solar cells: from inorganic thin films to organic photovoltaics. MRS Bull 37:642–650CrossRef
129.
Jesse S, Kumar A, Arruda TM, Kim Y, Kalinin SV, Ciucci F (2012) Electrochemical strain microscopy: probing ionic and electrochemical phenomena in solids at the nanometer level. MRS Bull 37:651–658CrossRef
130.
Lee W, Prinz FB, Chen X, Nonnenmann S, Bonnell DA, O’Hayre RP (2012) Nanoscale impedance and complex properties in energy-related systems. MRS Bull 37:659–667CrossRef
131.
Lai SCS, Macpherson JV, Unwin PR (2012) In situ scanning electrochemical probe microscopy for energy applications. MRS Bull 37:668–676CrossRef
132.
Besenbacher F, Thostrup P, Salmero M (2012) The structure and reactivity of surfaces revealed by scanning tunneling microscopy. MRS Bull 37:677–681CrossRef
133.
Park WI, You BK, Mun BH, Seo HK, Lee JY, Hosaka S, Yin Y, Ross CA, Lee KJ, Jung YS (2013) Self-assembled incorporation of modulated block copolymer nanostructures in phase-change memory for switching power reduction. ACS Nano 7:2651–2658CrossRef
134.
Olmos CM, Rasool HI, Weiller BH, Gimzewski JK (2013) Graphene MEMS: AFM probe performance improvement. ACS Nano 7(5):4164–4170CrossRef
135.
Puddy RK, Chua CJ, Buitelaar MR (2013) Transport spectroscopy of a graphene quantum dot fabricated by atomic force microscope nanolithography. Appl Phys Lett 103:183117CrossRef
Metadata
Title
Scanning Probe Microscopy for Nanolithography
Author
C. B. Samantaray
Copyright Year
2015
Publisher
Springer Berlin Heidelberg
Book
Surface Science Tools for Nanomaterials Characterization

Print ISBN: 978-3-662-44550-1

Electronic ISBN: 978-3-662-44551-8

Copyright Year: 2015

DOI
https://doi.org/10.1007/978-3-662-44551-8_3

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