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2022 | OriginalPaper | Chapter

11. Schichttechniken

Author : Ha Duong Ngo

Published in: Technologien der Mikrosysteme

Publisher: Springer Fachmedien Wiesbaden

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Zusammenfassung

Unter Schichttechniken werden die Dickschicht- und die Dünnschichttechnik verstanden. Sie basieren darauf, dass auf Trägerplättchen (Substrate) Leiterbahnen, Widerstands-, Dielektrikums- oder Isolierschichten durch Siebdrucken (Dickschichttechnik), Vakuumbedampfen oder Sputtern (Dünnschichttechnik) erzeugt werden, um Schaltungs- oder Sensorstrukturen zu realisieren. Werden zusätzlich aktive und/oder passive Bauelemente (z. B. Chip-Kondensatoren, Chip-Widerstände, Dioden, Transistoren, IC) aufgebracht, so spricht man bei den entstehenden Schaltungen von Hybridschaltungen.

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Metadata
Title
Schichttechniken
Author
Ha Duong Ngo
Copyright Year
2022
Book
Technologien der Mikrosysteme

Print ISBN: 978-3-658-37497-6

Electronic ISBN: 978-3-658-37498-3

Copyright Year: 2022

DOI
https://doi.org/10.1007/978-3-658-37498-3_11